Silicon-based Ultimate Miniature Magnetic Inductors Technology for High-efficiency DC-DC Conversion

Peng, Lulu; Ali, Zishan; Selvaraj, Lawrence; Cheng, Chor Shu; Ng, Yong Chau; Yosokumoro, Nur Aziz; Lehmann, Lothar; Rohlfs, Patrick; Wieland, Marcel

doi:10.1109/ispsd46842.2020.9170162

Cited by 10 publications

(7 citation statements)

References 10 publications

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“…The frequency BW of this device was also considerable (FSR = 300 MHz). Similar results were reported in [21] for a structure with the second highest FoM.…”

Section: Figure Of Meritsupporting

confidence: 88%

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An Overview of Fully On-Chip Inductors

Ondica¹,

Kovac²,

Hudec³

et al. 2023

RADIOENGINEERING

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This paper focuses on full integration of passive devices, especially inductors with emphasis on multi-layer stacked (MLS) structures of fully integrated inductors using patterned ground shield (PGS) and fully integrated capacitor. Comparison of different structures is focused on the main electrical parameters of integrated inductors (e.g. inductance 𝐿, inductance density 𝐿 𝐴 , quality factor 𝑄, frequency of maximum quality factor 𝐹 𝑄max , self-resonant frequency FSR, and series resistance 𝑅 DC ) and other non-electrical parameters (e.g. required area, manufacturing process, purpose, etc.) that are equally important during comparison of the structures. Categorization of inductor structures with most significant results that was reported in the last years is proposed according to manufacturing process. Final geometrical and electrical properties of the structure in great manner accounts to the fabrication process of integrated passive device. This work offers an overview and state-of-the-art of the integrated inductors as well as manufacturing processes used for their fabrication. Second purpose of this paper is insertion of the proposed structure from our previous work among the other results reported in the last 7 years. With the proposed solution, one can obtain the highest inductance density 𝐿 𝐴 = 23.59 nH/mm 2 and second highest quality factor 𝑄 = 10.09 amongst similar solutions reported in standard technologies that is also suitable competition for integrated inductors manufactured in advanced technology nodes.

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“…The frequency BW of this device was also considerable (FSR = 300 MHz). Similar results were reported in [21] for a structure with the second highest FoM.…”

Section: Figure Of Meritsupporting

confidence: 88%

“…For the direct comparison of structures, we introduced a new figure of merit defined by ( 1) and (3). Using this evaluation method, we consider works [21] and [29] as the best examples of integrated inductor design. Both integrated inductors were designed and fabricated for use in a fully integrated voltage regulator.…”

Section: Discussionmentioning

confidence: 99%

An Overview of Fully On-Chip Inductors

Ondica¹,

Kovac²,

Hudec³

et al. 2023

RADIOENGINEERING

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“…The core also affects the inductance and other properties of inductors [4]. For example, in work [5], insertion of a magnetic core into solenoid inductor caused improvement of Inductance and Quality Factor 27.8 times and 5.2 times, respectively.…”

Section: Inductormentioning

confidence: 99%

“…• Solenoid [4], [5], [10], [28]- [36] III. FABRICATION PROCESS Fabrication process of the whole chip is tightly connected to properties of designed circuit/system as well as every single component.…”

Section: Inductormentioning

confidence: 99%

Fully Integrated On-Chip Inductors: An Overview

Robert

Kovac

Richard

et al. 2022

2022 20th International Conference on Emerging eLearning Technologies and Applications (ICETA)

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This paper presents an overview and State-of-the-Art of fully integrated inductors with common fabrication processes used for implementation of these structures into a chip. The first step is an overview of fabrication technologies that starts with standard CMOS general purpose processes expanded by Far-BEOL and substrate alteration process (SOI, Silicon Embedded, TSV, TGV, PTH, Core Insertion); and continues to advanced process nodes like SMMT and Bond Wire utilization. Then, an overview of fully integrated inductor structures consists of selected topologies with notable parameters achieved in last few years. Critical parameters of integrated inductors include: inductance L DC , inductance density L A , quality factor Q, selfresonant frequency FSR and series resistance R DC . These parameters are as important as the purpose and fabrication process.

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“…Determining the number of phases for optimized overall inductor density is essential, especially for size-sensitive applications such as converters employing on-chip and copackaged inductors, as in [5] (1-4 phases), [6] (1-8 phases), [7] (1-4 phases), and [8] (16 phases). The interleaved buck has been widely investigated for various converter specifications and packaging technologies, e.g., [9], [10], [11], [12], [13], [14].…”

mentioning

confidence: 99%

Optimum Phase Count in a 5.4-W Multiphase Buck Converter Based on Output Filter Component Energies

Kandeel

O’Driscoll

O’Mathuna

et al. 2023

IEEE Trans. Power Electron.

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This article presents an analysis of low-power, multiphase interleaved buck converters to illustrate the extent to which adding more phases is beneficial for reducing the passive components' sizes. The analysis focuses on a typical converter application with a wide operating duty cycle range and requires good load transient. It is shown that by restricting the phase current ripple, the theoretical reduction in total inductor peak energy predicted for increased phase numbers is limited. The article assesses the benefit of inductor coupling and presents guidelines for coupling factor selection to avoid steady-state inductance roll-off over the wide input voltage range. Standard printed circuit board (PCB) manufacturing design rules are shown to place a practical phase count limit considering the reduction in total inductor size. PCB integrated, air-core solenoid and spiral inductors are implemented in both single-and two-phase 5.4 W, 20 MHz buck converter prototypes. When compared with single-phase designs, two-phase spiral inductors are 44% smaller, and the two-phase solenoid has a 54% lower loss. The two-phase prototype converter achieves better overall efficiency and peaks at almost 90% at V IN = 4.5 V, V OUT = 1.8 V, and F SW = 20 MHz.

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Silicon-based Ultimate Miniature Magnetic Inductors Technology for High-efficiency DC-DC Conversion

Cited by 10 publications

References 10 publications

An Overview of Fully On-Chip Inductors

An Overview of Fully On-Chip Inductors

Fully Integrated On-Chip Inductors: An Overview

Optimum Phase Count in a 5.4-W Multiphase Buck Converter Based on Output Filter Component Energies

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