Silicon cantilever beam micromachining and structure geometry characterization

Ionașcu, Georgeta; Manea, E.; Comeaga, Constantin Daniel; Alexandrescu, N.; Cernica, I.; Bogatu, Lucian

doi:10.1109/smicnd.2009.5336558

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A Small Toy Application: Cantilever Deformation Measurement1

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2016

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“…The cantilever is fixed within a holder and is deformed by the moving of the tool tip; see Figure 11. Such an experiment may have several applications in the mechanical characterization of cantilevers [30], of biological deformable objects [31], etc. To check the accuracy of the calibration process, a simple test can be made.…”

Section: A Small Toy Application: Cantilever Deformation Measurementmentioning

confidence: 99%

Spatiotemporal Calibration of Electron Microscopes

Malti¹

2016

Modern Electron Microscopy in Physical and Life Sciences

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This chapter presents a method of calibration for scanning electron microscopes (SEMs). The described calibration method is a twofold step. The first step evaluates the dynamical drift parameters. The second step estimates the parameters of the geometric projection and the static distortion. Both steps process the calibration parameters across the range of magnification scales, thanks to a representation with partial differential equations. The chapter is provided with an example of calibration of the JEOL JSM 820 and an example of application in metrology. The presented method is not the unique way of calibrating an SEM and can be a good start to inspire other methods of calibration.

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Section: A Small Toy Application: Cantilever Deformation Measurementmentioning

confidence: 99%

Spatiotemporal Calibration of Electron Microscopes

Malti¹

2016

Modern Electron Microscopy in Physical and Life Sciences

View full text Add to dashboard Cite

show abstract

Silicon cantilever beam micromachining and structure geometry characterization

Cited by 1 publication

References 1 publication

Spatiotemporal Calibration of Electron Microscopes

Spatiotemporal Calibration of Electron Microscopes

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