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To remove the shortcomings from the manufacturing process it is necessary to optimize all process parameters, for all stages of technological process: the exposure, the development, the electroforming and removal of the exposed SU8. This research implies that various types of MEMS devices can be developed at a high accuracy with design flexibility, only if all process parameters are optimized. This article is presenting a study regarding typical errors arisen during manufacturing of micro-parts using UV-LIGA technology.

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