Influence of technological parameters on the dynamic behavior of a MEMS accelerometer

Comeaga, Constantin Daniel; Ionașcu, Georgeta; Manea, E.; Sandu, Andrei Victor; Bogatu, Lucian; Besnea, Daniel

doi:10.1109/smicnd.2010.5650639

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“…Piezo-resistive accelerometers [4,6,[7][8][9][10][11][12][13][14] belong to the category of resistive MEMS systems used for the measurement of acceleration in automobiles, aerospace, medical electronic systems, machine control, robotics, vibration monitoring, seismology [15][16][17][18][19][20][21][22][23][24] etc. The first piezo-resistive accelerometer was proposed by Roylance and Angell (1979) [25].…”

Section: Introductionmentioning

confidence: 99%

Novel architecture for measurements in resistive MEMS sensors

Nandi¹,

Biswas²,

Dhar

et al. 2014

Meas. Sci. Technol.

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A low voltage, low power, resistive sensor architecture is proposed in this paper. The architecture is novel as it enhances the sensitivity along the main axis as well as reducing the impact of cross axes components. The proposed scheme also allows the simultaneous measurement of sensitivity along six different axes. With less than 15% of the power of its Wheatstone bridge [1] counterpart and with a voltage level as low as 2.25 V, this architecture also enables the realization of the sensor using fewer resistive elements. The modified sensor structure, along with the front-end signal processing circuit, is discussed.

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