Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement

Frank, Thomas; Doering, Lutz; Heinrich, G.; Thronicke, Nicole; Löbner, C.; Völlmeke, St.; Steinke, Arndt; Reich, Steffen

doi:10.1007/s00542-014-2092-0

Cited by 10 publications

(15 citation statements)

References 1 publication

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“…Effective piezo-resistive sensing can be implemented as long as the sensor can efficiently contact the sensing object. Diaphragms or cantilevers are sometimes used to increase sensing efficiency by increasing mechanical deflection and stress [ 31 , 32 , 33 , 34 ]. For a piezo-resistive sensing system, the read out circuit can be as simple as a DC biased Weston bridge.…”

Section: Tactile Sensing Principles and Structuresmentioning

confidence: 99%

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Novel Tactile Sensor Technology and Smart Tactile Sensing Systems: A Review

Zou

Wang

et al. 2017

Sensors

228

110

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During the last decades, smart tactile sensing systems based on different sensing techniques have been developed due to their high potential in industry and biomedical engineering. However, smart tactile sensing technologies and systems are still in their infancy, as many technological and system issues remain unresolved and require strong interdisciplinary efforts to address them. This paper provides an overview of smart tactile sensing systems, with a focus on signal processing technologies used to interpret the measured information from tactile sensors and/or sensors for other sensory modalities. The tactile sensing transduction and principles, fabrication and structures are also discussed with their merits and demerits. Finally, the challenges that tactile sensing technology needs to overcome are highlighted.

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Section: Tactile Sensing Principles and Structuresmentioning

confidence: 99%

“…For a piezo-resistive sensing system, the read out circuit can be as simple as a DC biased Weston bridge. The reported maximum piezo-resistive sensing sensitivity can reach 0.25 mV/nm [ 33 ].…”

Section: Tactile Sensing Principles and Structuresmentioning

confidence: 99%

Novel Tactile Sensor Technology and Smart Tactile Sensing Systems: A Review

Zou

Wang

et al. 2017

Sensors

228

110

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“…Piezoresistive tactile sensors require variable electrical resistivity and good mechanical resilience, most of which are common physical properties of metals, semiconductors, and polymeric materials. In early years, resistive tactile sensors have been made from the monocrystalline silicon and polycrystalline silicon . In recent years, research has extensively demonstrated piezoresistive properties in carbon nanomaterials such as multiwalled carbon nanotubes (MWCNTs) and graphene .…”

Section: Artificial Sensitive Skins For Roboticsmentioning

confidence: 99%

Artificial Sensitive Skin for Robotics Based on Electrical Impedance Tomography

Wang

et al. 2020

Advanced Intelligent Systems

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Electrical impedance tomography (EIT) is a noninvasive measurement technique that estimates the internal resistivity distribution based on the boundary voltage–current data measured from the surface of the conductor. If a thin stretchable soft material with a certain piezoresistive property is used as the electrical conductor, EIT has the ability to reconstruct the position where the resistivity changes due to the inside pressure contact, so that a large‐scale artificial sensitive skin is provided for robotics. First, the different conduction principles and material types of artificial sensitive skins are discussed, which is next followed by the different driving modes and image reconstruction techniques. Then, details on how EIT is used for robotic skin applications are described. Finally, the development trends and future potentials of EIT‐based robotic skins are expounded.

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“…Virgin tips show tip radii of down to 50 nm. The microprobes are now also commercially available from the CiS GmbH in Erfurt, Germany [7]. In a research project currently the wear of the tips, a wear protection by a coating und the increase of the scanning speed up to 15 mm/s is investigated.…”

Section: D Roughness Microprobementioning

confidence: 99%

“…The second sensor developed together with the Institute of Semiconductor Technology (IHT) of Braunschweig Technical University was a piezoresistive 2D microprobe with integrated silicon tip for roughness measurements inside of modern diesel injection nozzles. The smallest version of this sensor is only 30 µm wide but 1.5 mm long and allows to measure roughness in bore holes with diameters below 100 µm [6,7]. The third sensor is a 1D micro-electro-mechanical system (MEMS) based on a lateral comb drive with electrostatic actuation and capacitive displacement measurement.…”

Section: Introductionmentioning

confidence: 99%

Smart sensors and calibration standards for high precision metrology

et al. 2015

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The paper summarize the PTB activities in the field of silicon sensors for dimensional metrology especially roughness measurements and silicon calibration standards developed during the past ten years. A focus lies in the development of 2D silicon microprobes which enable roughness measurements in nozzles as small as 100 µm in diameter. Moreover these microprobes offer the potential for very fast tactile measurements up to 15 mm/s due to their tiny mass and therefore small dynamic forces. When developing high precision tactile sensors care has to be taken, not to scratch the often soft surfaces. Small probing forces and well defined tip radii have to be used to avoid surface destruction. Thus probing force metrology and methods to determine the radius and form of probing tips have been developed. Silicon is the preferred material for the calibration of topography measuring instruments due to its excellent mechanical and thermal stability and due to the fabrication and structuring possibilities of silicon microtechnology. Depth setting standards, probing force setting standards, tip radius and tip form standards, reference springs and soft material testing artefacts will be presented.

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Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement

Cited by 10 publications

References 1 publication

Novel Tactile Sensor Technology and Smart Tactile Sensing Systems: A Review

Novel Tactile Sensor Technology and Smart Tactile Sensing Systems: A Review

Artificial Sensitive Skin for Robotics Based on Electrical Impedance Tomography

Smart sensors and calibration standards for high precision metrology

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