Silicon doped diamond-like carbon films as a coating for improvement of electron field emission

Abstract

Emission stability of a diamond-like carbon coated metal-tip field emitter array Enhancement of emission characteristics for field emitters by N-doped hydrogen-free diamond-like-carbon coating J. Vac. Sci. Technol. B 17, 246 (1999); 10.1116/1.590507 Field emission of nitrogen doped diamondlike carbon films deposited by plasma enhanced chemical vapor deposition J.

Impedance Response and Phase Angle Determination of Metal-Semiconductor Structure with N-Doped Diamond Like Carbon Interlayer

“…DLC films can be used in MIS structures in electronic technology as well as in solar cells, microelectronicmechanical systems and various heterostructures. While factors such as H content, sp 2 and sp 3 bond content and lattice disorder reveal the properties of these films, it is known that sp 2 bonds are effective on electronic act and optical properties, while sp 3 bonds control mechanical and tribological properties (Evtukh et al, 2003;Hajimazdarani et al, 2021;Cetinkaya et al, 2023). To effectively increase the graphitization of carbon films, doping DLC films with dopants such as Si, N, Cu, Ti, and S is beneficial for conduction states (Evtukh et al, 2003;Basman & Varol, 2019;Feizollahi Vahid et al, 2023).…”

“…While factors such as H content, sp 2 and sp 3 bond content and lattice disorder reveal the properties of these films, it is known that sp 2 bonds are effective on electronic act and optical properties, while sp 3 bonds control mechanical and tribological properties (Evtukh et al, 2003;Hajimazdarani et al, 2021;Cetinkaya et al, 2023). To effectively increase the graphitization of carbon films, doping DLC films with dopants such as Si, N, Cu, Ti, and S is beneficial for conduction states (Evtukh et al, 2003;Basman & Varol, 2019;Feizollahi Vahid et al, 2023). DLC films, which are also delineated as amorphous forms of carbon materials, take place in many applications such as magnetic storage disks, wearresistant films, biomedical coatings, and optical coatings (Basman et al, 2015;Zeng et al, 2014;Zhang et al, 2020).…”