Silicon IC Process Compatible Bolometer Infrared Focal Plane Array

Tanaka, A.; Matsumoto, S.; Tsukamoto, Nanao; Roh, Seulki; Endoh, Tsutomu; Nakazato, Akihiro; Kumazawa, Y.; Hijikawa, M.; Gotoh, Hideki; Танака, Тадатсугу; Teranishi, Nobukazu

doi:10.1109/sensor.1995.721911

Cited by 21 publications

(10 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…3. To improve the sensitivity performance, there are efforts to implement microbolometers using various materials, such as vanadium oxide (VO x ) [5][6][7] , amorphous silicon (a-Si) [8][9][10] , polycrystalline silicon-germanium (poly SiGe) 11,12 , yttrium barium copper oxide (YBaCuO) 13,14 , and metal films 15,26 . A high performance, very close to those of cooled infrared detectors, has been demonstrated with this approach, resulting in focal plane array (FPA) sizes as large as 640 × 480 and pixel sizes ranging from 50 µm down to 17 µm, especially using VOx and a-Si at much lower cost [5][6][7][8][9][10] .…”

Section: International Scenario and Recent Developmentsmentioning

confidence: 99%

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Bhan¹,

Saxena²,

Jalwania³

et al. 2009

DSJ

View full text Add to dashboard Cite

Recently, a lot of attention has been paid to infrared imaging using uncooled microbolometer detectors, primarily because of their low cost, and wide military and civilian applications. This paper reviews the basic principles of these detectors and some of the important works done internationally in this field. This paper presents some of the research work on titanium microbolometer carried out at Solid State Physics Laboratory, Delhi.

show abstract

Section: International Scenario and Recent Developmentsmentioning

confidence: 99%

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Bhan¹,

Saxena²,

Jalwania³

et al. 2009

DSJ

View full text Add to dashboard Cite

show abstract

“…Safety systems include both active safety technologies, such as a night vision sensor 30) and a pedestrian detection sensor 12) , and passive safety technologies typified by intelligent airbags. Examples of systems for improving occupant comfort and convenience include those for passenger compartment climate control by means of an interior IR thermometer and new human-machine interfaces (HMI).…”

Section: Classification By Benefitmentioning

confidence: 99%

“…This system was proposed in the second phase (1996)(1997)(1998)(1999)(2000) of the ASV project and was incorporated in the Nissan ASV-2 12) . As shown in Fig.…”

Section: Blind Spot Pedestrian Warning Systemmentioning

confidence: 99%

“…In 1999, a system was put on the market that uses that sensor technology to provide IR images of the road ahead to drivers at night. 8) Many research institutes [9][10][11][12][13][14][15][16][17][18][19][20] have been actively engaged in the development of IR sensors since the early 1990s. To date, various types of uncooled IR imaging sensors have been developed, including the thermoelectric type, 11,15) the amorphous silicon bolometer 18) and the silicon-on-insulator (SOI) diode.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Low-cost thermo-electric infrared FPAs and their automotive applications

2008

View full text Add to dashboard Cite

This paper describes three low-cost infrared focal plane arrays (FPAs) having a 1,536, 2,304, and 10,800 elements and experimental vehicle systems. They have a low-cost potential because each element consists of p-n polysilicon thermocouples, which allows the use of low-cost ultra-fine micro-fabrication technology commonly employed in the conventional semiconductor manufacturing processes. To increase the responsivity of FPA, we have developed a precisely patterned Au-black absorber that has high infrared absorptivity of more than 90%. The FPA having a 2,304 elements achieved high resposivity of 4,300 V/W. In order to reduce package cost, we developed a vacuum-sealed package integrated with a molded ZnS lens. The camera aiming the temperature measurement of a passenger cabin is compact and light weight devices that measures 45 × 45 × 30 mm and weighs 190 g. The camera achieves a noise equivalent temperature deviation (NETD) of less than 0.7°C from 0 to 40°C. In this paper, we also present a several experimental systems that use infrared cameras. One experimental system is a blind spot pedestrian warning system that employs four infrared cameras. It can detect the infrared radiation emitted from a human body and alerts the driver when a pedestrian is in a blind spot. The system can also prevent the vehicle from moving in the direction of the pedestrian. Another system uses a visible-light camera and infrared sensors to detect the presence of a pedestrian in a rear blind spot and alerts the driver. The third system is a new type of human-machine interface system that enables the driver to control the car's audio system without letting go of the steering wheel. Uncooled infrared cameras are still costly, which limits their automotive use to high-end luxury cars at present. To promote widespread use of IR imaging sensors on vehicles, we need to reduce their cost further.

show abstract

“…(12) where k is the Boltzman constant, T is the absolute temperature (K), Llf is the frequency band (Hz), R is the electrical resistance (Q), I is the amplifier current noise (A) and Va is the amplifier voltage noise (V). Using the foregoing equations, the dynamic S/N ratio (SNd) and the static S/N ratio (SNJ are given by SNd=_=B2(t (13) N N E•R SN = (14) S N Thermal resistance R,h, which determines responsivity R, is calculated with Eq.…”

Section: Calculation Of Dynamic S/n Ratiomentioning

confidence: 99%

Linear thermopile array for fast searching

et al. 1999

View full text Add to dashboard Cite

A linear thermopile array with characteristics ofhigh responsivity, fast response and low cost has been developed for use in searching for and detecting heat-radiating objects. The thermopile is fabricated by means of a silicon surface micromachining, compatible Si CMOS process and a lift-off technique, which results in a precisely patterned Au black absorption layer. The dynamic signal-to-noise ratio is proposed as a new figure of merit for evaluating thermal infrared sensors and is used to design the thermopile configuration so as to obtain optimum responsivity and thermal time constant. The newly fabricated thermopile array is composed of a zigzag arrangement of two rows of seven infrared sensing elements and achieves responsivity of 230 V/W and a thermal time constant of 0.5 msec. The array, incorporating an optical system with a 30-mm-diameter lens and an focal ratio (F/#) of 0.74, provides a dynamic S/N ratio of 6.9 at a scanning speed of 1,000 m/s and a distance of 80 m for a target with a background temperature difference of 25°C.

show abstract

Silicon IC Process Compatible Bolometer Infrared Focal Plane Array

Cited by 21 publications

References 2 publications

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Uncooled Infrared Microbolometer Arrays and their Characterisation Techniques

Low-cost thermo-electric infrared FPAs and their automotive applications

Linear thermopile array for fast searching

Contact Info

Product

Resources

About