Silicon nanostructure-based photonic MEMS sensor for biosensing application

Upadhyaya, Anup M.; Srivastava, Maneesh C.; Sharan, Preeta; Roy, Sandip Kumar

doi:10.1117/1.jnp.15.026001

Cited by 11 publications

(1 citation statement)

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“…Changes in microstructural and chemical composition also induce degradation of the mechanical properties of Si-based transient devices, which have rarely been explored previously. For example, Si-based implants have been extensively developed for use as chronic intracortical electrodes (e.g., silicon micromachined Utah arrays) to decode neural signals [ 32 ], as well as bio-microelectromechanical systems (Bio-MEMS) for biosensing [ 33 ]. In these scenarios not only chemical corrosion, but also mechanical failure, greatly challenges the reliability, stability, and longevity of devices.…”

Section: Resultsmentioning

confidence: 99%

Degradation Study of Thin-Film Silicon Structures in a Cell Culture Medium

Wang

Tian

et al. 2022

Sensors

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Thin-film silicon (Si)-based transient electronics represents an emerging technology that enables spontaneous dissolution, absorption and, finally, physical disappearance in a controlled manner under physiological conditions, and has attracted increasing attention in pertinent clinical applications such as biomedical implants for on-body sensing, disease diagnostics, and therapeutics. The degradation behavior of thin-film Si materials and devices is critically dependent on the device structure as well as the environment. In this work, we experimentally investigated the dissolution of planar Si thin films and micropatterned Si pillar arrays in a cell culture medium, and systematically analyzed the evolution of their topographical, physical, and chemical properties during the hydrolysis. We discovered that the cell culture medium significantly accelerates the degradation process, and Si pillar arrays present more prominent degradation effects by creating rougher surfaces, complicating surface states, and decreasing the electrochemical impedance. Additionally, the dissolution process leads to greatly reduced mechanical strength. Finally, in vitro cell culture studies demonstrate desirable biocompatibility of corroded Si pillars. The results provide a guideline for the use of thin-film Si materials and devices as transient implants in biomedicine.

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Section: Resultsmentioning

confidence: 99%