Silicon-on-Diamond — An engineered substrate for electronic applications

Aleksov, A.; Gobien, J.M.; Li, X.; Prater, J. T.; Sitar, Zlatko

doi:10.1016/j.diamond.2005.09.012

Cited by 40 publications

(14 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…[50] Detailed investigations using synchrotron-based, near-edge X-ray absorption, fine-structure spectroscopy (NEXAFS) showed that NCD films grown using this seeding approach and growth chemistry are of very high quality, with greater than 99% sp 3 bonding. [51] This form of NCD has led to applications in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), [52][53][54][55][56][57][58] secondary electron emitters, [59][60][61][62] biocompatible coatings, [63][64][65][66][67][68] silicon on diamond substrates, [69][70][71] and sensors. [72,73] As a class, NCD films cover a wide range of materials ranging from films with properties approaching singlecrystal diamond to others which are useful for specialized applications such as field emission, and biomedical implants, even though their specific properties differ from those of single-crystal diamond.…”

Section: Historical Overviewmentioning

confidence: 99%

See 1 more Smart Citation

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

View full text Add to dashboard Cite

The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

show abstract

Section: Historical Overviewmentioning

confidence: 99%

“…[150] NCD films have been incorporated into silicon on insulator (SOI) wafers. [69][70][71] Chemically modified NCD and UNCD diamond surfaces are proving to be an important and stable platform for chemical and DNA sensing. [63,65,68,151] Thin film transistors with covalent molecular functionalization have been demonstrated.…”

Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

View full text Add to dashboard Cite

show abstract

“…More recently, they have been incorporated into silicon on insulator (SOI) wafers [157,158]. NCD-based surface acoustic wave (SAW) devices have also been fabricated, taking advantage of the improved smoothness and sound velocity of 37 NCD films [159].…”

Section: Ncd and Uncd Applicationsmentioning

confidence: 99%

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

256

156

View full text Add to dashboard Cite

This paper reviews the growth of diamond by chemical vapour deposition (CVD). It includes the following seven parts: (1) Properties of diamond: this part briefly introduces the unique properties of diamond and their origin and lists some of the most common diamond applications. (2) Growth of diamond by CVD: this part reviews the history and the methods of growing CVD diamond. (3) Mechanisms of CVD diamond growth: this part discusses the current understanding on the growth of metastable diamond from the vapour phase. (4) Characterization of CVD diamond: we discuss the two most common techniques, Raman and XRD, which have been intensively employed for characterizing CVD diamond. (5) CVD diamond growth characteristics: this part demonstrates the characteristics of diamond nucleation and growth on various types of substrate materials. (6) Nanocrystalline diamond: in this section, we present an introduction to the growth mechanisms of nanocrystalline diamond and discuss their Raman features. This paper provides necessary information for those who are starting to work in the field of CVD diamond, as well as for those who need a relatively complete picture of the growth of CVD diamond.

show abstract

“…Most of the research on SOD fabrication are based on Chemical Vapor Deposition (CVD) of polycrystalline (pCVD) diamond on silicon [5,6,7]. This approach can be satisfactory as far as diamond is used as an electrically insulator and thermal spreading material.…”

Section: Semiconductor On Diamond Researchmentioning

confidence: 99%

New perspectives for the Silicon-On-Diamond material

Lagomarsino¹,

Parrini²,

Sciortino³

et al. 2010

Proceedings of 9th International Conference on Large Scale Applications and Radiation Hardness of Semiconductor Detectors — PoS

View full text Add to dashboard Cite

A recent laser bonding technique has been developed to prepare silicon-on-diamond material. This method allows the independent choice of the quality of the silicon and diamond plates to be processed. This opens a wide field of applications for silicon-on-diamond devices. We present and discuss the laser technique and the experimental results achieved. Two new projects involving relevant issues both in high energy physics and in biological applications are also presented.

show abstract

Silicon-on-Diamond — An engineered substrate for electronic applications

Cited by 40 publications

References 7 publications

The CVD of Nanodiamond Materials

The CVD of Nanodiamond Materials

Diamond growth by chemical vapour deposition

New perspectives for the Silicon-On-Diamond material

Contact Info

Product

Resources

About