Silicon-on-Glass Dielectric Waveguide—Part I: For Millimeter-Wave Integrated Circuits

Ranjkesh, Nazy; Basha, Mohammad Abd Alkhalik; Taeb, Aidin; Zandieh, Alireza; Gigoyan, Suren; Safavi‐Naeini, Safieddin

doi:10.1109/tthz.2015.2399693

Cited by 48 publications

(27 citation statements)

References 22 publications

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“…The fabrication process of the new suspended SOG structure is quite simple and essentially consists of the same steps as the ones described in the recent mmW SOG platform [17]. In this technique, the guiding channel along with its supporting parts is made by DRIE through the Si layer of the SOG platform.…”

Section: Suspended Sog Waveguidementioning

confidence: 99%

“…The present work introduces a low-loss and low-cost THz integrated dielectric waveguide, which is designed and fabricated on a recently proposed planer integrated technology platform, called "Silicon-on-Glass (SOG)" [17]. SOG, which consists of a high-resistivity Si wafer bonded on a glass substrate, was proposed and developed by the authors for mmW integrated circuits [17], [18].…”

Section: Introductionmentioning

confidence: 99%

“…SOG, which consists of a high-resistivity Si wafer bonded on a glass substrate, was proposed and developed by the authors for mmW integrated circuits [17], [18].…”

Section: Introductionmentioning

confidence: 99%

“…The entire integrated circuit pattern is projected on the etching mask via the photolithography process. A unique advantage of the SOG technology, developed by the authors, is that the manual and time-consuming alignment of the complex structures used in the conventional image line fabrication [11], is replaced by the high-precision and uniform photolithography process [17].…”

Section: Introductionmentioning

confidence: 99%

“…SOG ridge dielectric waveguides for mmW were tested up to 170 GHz and their low-loss transmission characteristics were demonstrated [17]. This paper investigates extending the SOG platform into sub-mmW/THz ranges.…”

Section: Introductionmentioning

confidence: 99%

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Silicon-on-Glass Dielectric Waveguide—Part II: For THz Applications

Ranjkesh

Basha

Taeb

et al. 2015

IEEE Trans. THz Sci. Technol.

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A low-loss sub-millimeter-wave/THz integrated dielectric waveguide is presented. The proposed waveguide consists of a highly resistive Silicon (Si) guiding channel bonded to a glass substrate. To reduce the waveguide insertion loss due to the glass substrate, part of the substrate below the Si guiding channel is etched. A periodic configuration of supporting beams is used to hold the Si guiding channel over the glass substrate. A low-cost and high-precision fabrication process, which is fully compatible with current Si-based fabrication technologies, is developed for the proposed waveguide. Numerical simulations and experiments are conducted to investigate the performance of the proposed waveguide. Measured attenuation constant of the proposed waveguide is 0.0346 dB/ (average value) over the 440-500 GHz band.Index Terms-Dielectric waveguide, THz integrated circuit, Silicon-on-Glass (SOG) waveguide.

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Section: Suspended Sog Waveguidementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…SOG, which consists of a high-resistivity Si wafer bonded on a glass substrate, was proposed and developed by the authors for mmW integrated circuits [17], [18].…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Silicon-on-Glass Dielectric Waveguide—Part II: For THz Applications

Ranjkesh

Basha

Taeb

et al. 2015

IEEE Trans. THz Sci. Technol.

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Broadband Single‐Mode Hybrid Photonic Crystal Waveguides for Terahertz Integration on a Chip

Low

Ako

et al. 2020

Adv Materials Technologies

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Broadband, low-loss, low-dispersion propagation of terahertz pulses in compact waveguide chips is indispensable for terahertz integration. Conventional two-dimensional photonic crystals (PCs) based terahertz waveguides are either all-metallic or all-dielectric, having either high propagation losses due to the Ohmic loss of metal, or a narrow transmission bandwidth restricted by the range of single-mode operation in a frequency range defined by the PC bandgap, respectively. To address this problem, a hybrid (metal/dielectric) terahertz waveguide chip is developed, where the guided mode is completely confined by parallel gold plates and silicon PCs in vertical and lateral directions, respectively. A unique multi-wafer silicon-based fabrication process, including gold-silicon eutectic bonding, micropatterning, and Bosch silicon etching, is employed to achieve the self-supporting hybrid structure. Theoretical and experimental investigations demonstrate that the hybrid waveguide supports a singlemode transmission covering 0.367-0.411 THz (bandwidth of 44 GHz, over twice wider than that of allsilicon PC waveguides) with low loss (below 0.05 dB mm -1 ) and low group velocity dispersion (from -8.4 ps THz -1 mm -1 to -0.8 ps THz -1 mm -1 ). This work enables more compact, wideband terahertz waveguides and auxiliary functional components that are integratable in chips towards ultra-highdensity integrated terahertz devices in particular in the field of wireless communications.Received: ((will be filled in by the editorial staff))Revised: ((will be filled in by the editorial staff))

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Discrete Substrates: Package Foundation

Božanić

Sinha

2019

Smart Sensors, Measurement and Instrumentation

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Silicon-on-Glass Dielectric Waveguide—Part I: For Millimeter-Wave Integrated Circuits

Cited by 48 publications

References 22 publications

Silicon-on-Glass Dielectric Waveguide—Part II: For THz Applications

Silicon-on-Glass Dielectric Waveguide—Part II: For THz Applications

Broadband Single‐Mode Hybrid Photonic Crystal Waveguides for Terahertz Integration on a Chip

Discrete Substrates: Package Foundation

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