Silicon Photodetectors with a Selective Spectral Response

Wolffenbuttel, R.F.

doi:10.1002/1616-8984(200105)9:1<69::aid-seup69>3.0.co;2-q

Cited by 17 publications

(8 citation statements)

References 37 publications

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“…Microspectrometers satisfy these additional requirements better. These are small, lightweight, and some are fabricated using silicon process compatible technologies, thus featuring the possibility for realizing an intelligent optoelectronic system-on-a-chip by cointegration of optics with microelectronics [7]. However, the primary performance parameter, the spectral resolution, is limited to .…”

supporting

confidence: 38%

State-of-the-Art in Integrated Optical Microspectrometers

Wolffenbuttel

2004

IEEE Trans. Instrum. Meas.

196

108

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Abstract-Microspectrometers fabricated in silicon using microelectromechanical systems technologies are versatile microinstruments: small, lightweight, and featuring a demonstrated capability for spectral analysis. When realized using silicon process compatible technologies, low-cost batch fabrication of an intelligent optoelectronic system-on-a-chip is feasible by cointegration of optics with microelectronic circuits. However, the spectral resolution of devices presented so far has been limited to about = 15, which does restrict application. This paper provides an overview of microspectrometers operating in the visible and infrared spectral range. Moreover, it is demonstrated that the resolution is primarily limited due to the short optical path that is inherent to a microsystem, optical properties of silicon IC-process compatible materials, and lack of adequate optical signal conditioning.Index Terms-Integrated silicon microsystem, microelectromechanical systems (MEMS), optical sensor, spectrometer.

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confidence: 38%

State-of-the-Art in Integrated Optical Microspectrometers

Wolffenbuttel

2004

IEEE Trans. Instrum. Meas.

196

108

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“…The detector is to be used as a safety device to detect unintended extinction of the flame, which should result in the interruption of the fuel supply [10]. Figure 4: The UV bandpass optical filter with the CMOS photodiode underneath: a cross section view.…”

Section: Uv Microspectrometers Applicationssupporting

confidence: 43%

UV Bandpass Optical Filter for Microspectometers

2007

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This paper describes the design and modeling of a UV bandpass optical filter for microspectrometers. The materials used for fabricating the multilayer UV filter are: silicon dioxide (SiO 2 ), titanium dioxide (TiO 2 ) and yttrium oxide (Y 2 O 3 ). The optical filter shows a bandpass response wavelength in the range 230-280 nm, with a transmittance higher than 80%. Such a device is extremely suitable for optical detection of biological molecules with optical absorption or/and fluorescence in the UV spectral range. This UV optical filter can be built using post-processing after integrated-circuit and UV photodiode fabrication in a bipolar or CMOS technology. The dielectric multi-layer stack can be deposited on top of the UV photodiode after the standard technology process has been completed. The number of layers was optimized for 11 with all layers of a thickness acceptable for reproducible fabrication. The materials used for fabricating the UV filter are silicon compatible. Applications presented are in DNA solutions (to measure the optical density of these solutions at 260 nm) and in the detection of a gas flame in the presence of ambient light based on the different emission spectra in the UV.

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“…Gratings and Fabry-Perot optical resonance cavities have been applied successfully as dispersion elements in a microspectrometer [7]- [12]. Also, the fabrication of arrays of thermoelectric detectors has been demonstrated.…”

Section: Introductionsupporting

confidence: 40%