Spectral Performance of a Micromachined Infrared Spectrum Analyzer in Silicon

Kong, Seong Ho; Wolffenbuttel, R.F.

doi:10.1109/tim.2004.834050

Cited by 10 publications

(13 citation statements)

References 11 publications

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“…From this figure, it can be observed that the influence of the thermal conductance of air is significant. According to equation (9), R s is proportional to the thermal resistance, which means that R s is inversely proportional to the thermal conductance. Then the influence of the thermal conductance of air can be calculated.…”

Section: Characterization Of Thermopile In Vacuummentioning

confidence: 99%

Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process

Zhou

Kropelnicki

Tsai

et al. 2013

J. Micromech. Microeng.

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Section: Characterization Of Thermopile In Vacuummentioning

confidence: 99%

Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process

Zhou

Kropelnicki

Tsai

et al. 2013

J. Micromech. Microeng.

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“…Compact spectrometers for the visible range with a limited spectral resolution and based on a transmission grating have been demonstrated in the visible [2] and infrared [3] spectral range. Resolving power is limited to R = λ/ λ = 20, due to the lack of integrated optical components such as collimating lenses.…”

Section: Introductionmentioning

confidence: 99%

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

Grabarnik

Emadi

et al. 2008

J. Micromech. Microeng.

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The design and fabrication of a thermopile detector array for use in a fully integrated infrared optical spectrometer are described. IC-compatible MEMS technologies are used for fabrication of the spectrometer components, such as the slit, planar imaging diffraction grating and detector array. The IR micro-spectrometer was designed for operation in the 1.5-3 µm wavelength range with the size of the largest dimension about 8 mm. The imaging properties of the diffraction grating result in non-uniform dispersion, which imposes special requirements on the dimensions of each single detector in the array. The result is an array of unequally sized elements. The design considers technological constraints, sensitivity and cross-talk between elements. Simulation results, final design, fabrication technique and fabricated devices are presented.

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“…Although resonator-based devices have found application in channel separation for optical communication, grating-based MEMS systems have proven more suitable for operation over a wide spectral range [1]. To date, only lensless MEMS-based systems with a simple transmission grating that yield limited resolution have been realized due to the technological constraints of IC-compatible processing [2,3].…”

Section: Introductionmentioning

confidence: 99%

Optimal implementation of a microspectrometer based on a single flat diffraction grating

Grabarnik

Emadi

Sokolova³

et al. 2008

Appl. Opt.

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An analytical model has been developed and applied to explore the limits in the design of a highly miniaturized planar optical microspectrometer based on an imaging diffraction grating. This design tool has been validated as providing the smallest possible dimensions while maintaining acceptable spectral resolution. The resulting planar spectrometer is composed of two parallel glass plates, which contain all components of the device, including a reflective slit and an imaging diffraction grating. Fabrication is based on microelectromechanical system technology and starts with a single glass wafer; IC-compatible deposition and lithography are applied to realize the parts in aluminum, which makes the microspectrometer highly tolerant for component mismatch. The fabricated spectrometer was mounted directly on top of an image sensor and takes up a volume of only 50 mm 3 . The measured spectral resolution of 6 nm (FWHM) in the 100 nm operating wavelength range (600-700 nm) is in agreement with a model calculation.

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Spectral Performance of a Micromachined Infrared Spectrum Analyzer in Silicon

Cited by 10 publications

References 11 publications

Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process

Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

Optimal implementation of a microspectrometer based on a single flat diffraction grating

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