2010
DOI: 10.1016/j.solmat.2010.07.013
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Silicon PV devices based on a single step for doping, anti-reflection and surface passivation

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Cited by 22 publications
(19 citation statements)
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“…Solar cells on electric-arc micro-textured surfaces are fabricated using a standard procedure with a phosphorus emitter and a full area Al back surface field described in [8]. The steps include 1) Spin-on doping for formation of n-type emitter 2) Surface passivation with thermal oxide and plasma enhanced chemical vapor deposition (PECVD) of silicon nitride deposited at a temperature of 350 °C 3) Formation of back surface field and back contact with Ferro 53-038 aluminum paste 4) Photolithography for front contact patterning 5) E-beam evaporation of Ti/Pd/Ag.…”
Section: Lifetime Measurement and Solar Cell Fabricationmentioning
confidence: 99%
“…Solar cells on electric-arc micro-textured surfaces are fabricated using a standard procedure with a phosphorus emitter and a full area Al back surface field described in [8]. The steps include 1) Spin-on doping for formation of n-type emitter 2) Surface passivation with thermal oxide and plasma enhanced chemical vapor deposition (PECVD) of silicon nitride deposited at a temperature of 350 °C 3) Formation of back surface field and back contact with Ferro 53-038 aluminum paste 4) Photolithography for front contact patterning 5) E-beam evaporation of Ti/Pd/Ag.…”
Section: Lifetime Measurement and Solar Cell Fabricationmentioning
confidence: 99%
“…El-Shobokshy and Hussein [14] studied the effects of the size and density of dust particles on PV performance, and they found that fine dust had a greater effect on PV module performance than coarse dust. Moreover, Goossens and Kerschaever [15] performed [15][16] . By increases the the performance [16][17][18] .…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, Goossens and Kerschaever [15] performed [15][16] . By increases the the performance [16][17][18] .…”
Section: Introductionmentioning
confidence: 99%
“…Texturing of the front surface was carried out using TMAH solutions at 80 C for 30 minutes [33]. Solar cell processing before laser transferring metallization followed the lab procedures outlined in reference [34]. The After coating with this paste, the wafer was first soft baked at 200 °C and then inserted into a tube furnace at 800 °C for 5 minutes.…”
Section: Methodsmentioning
confidence: 99%
“…The other drawbacks include high infrastructure cost of the diffusion furnace system which also requires significant maintenance. Besides gas phase doping, the liquid phase doping in the form of spin-on glass has also been extensively studied [13,14].…”
Section: Metallization and Doping Techniquesmentioning
confidence: 99%