Silicon resonant microcantilevers for absolute pressure measurement

Bianco, Stefano; Cocuzza, Matteo; Ferrero, Sergio; Giuri, E.; Piacenza, G.; Pirri, Candido Fabrizio; Ricci, Alessandro; Scaltrito, Luciano; Bich, Danh; Merialdo, A.; Schina, P.; Correale, Raffaele

doi:10.1116/1.2214698

Cited by 81 publications

(66 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The predictions of the fit in Eq. ͑4͒ also agree with the experimental data of Bianco et al 15 ͑rms error less than 12% for pressures between 3 Pa͑Kn = 35.805͒ and 600 Pa͑Kn = 0.1790͒͒ for a microcantilever with nominal h =5 m and nominal = 20.…”

supporting

confidence: 81%

Unified theory of gas damping of flexible microcantilevers at low ambient pressures

Bidkar

Tung

Alexeenko

et al. 2009

Applied Physics Letters

View full text Add to dashboard Cite

Predicting the gas damping of microcantilevers oscillating in different vibration modes in unbounded gas at low pressures is relevant for increasing the sensitivity of microcantilever-based sensors. While existing free-molecular theories are valid only at very high Knudsen numbers, continuum models are valid only at very low Knudsen numbers. We solve the quasisteady Boltzmann equation and compute a closed-form fit for gas damping of rectangular microcantilevers that is valid over four orders of magnitude of Knudsen numbers spanning the free-molecular, the transition, and the low pressure slip flow regimes. Experiments are performed using silicon microcantilevers under controlled pressures to validate the theory.

show abstract

supporting

confidence: 81%

Unified theory of gas damping of flexible microcantilevers at low ambient pressures

Bidkar

Tung

Alexeenko

et al. 2009

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

“…(c) Comparison of our experiments with the trend Q ∼ 1/P 1/2 as suggested in the literature. 6,[9][10][11][12] The dashed blue line is the linear trend for cantilever A, the red dash-dot line is the linear trend for cantilever B, and the solid red line is for cantilever C.…”

Section: Resultsmentioning

confidence: 99%

“…In this case, the characteristic length is the effective width of the cantilevers ≈14 μm for cantilever B and C. Typically, the continuum regime applies to Kn < 0.1. 6,24 For air, 10 kPa is equivalent to Kn ≈0.07, so the deviation occurs approximately at the expected pressure. Cantilever A is wider, with an effective width of 35 μm, and therefore the pressure is lower before the mean free path reaches one tenth of the cantilever width (Kn = 0.1).…”

Section: Resultsmentioning

confidence: 99%

“…3 Micronsized structures, such as microfabricated cantilevers, have been used to study and measure a number of chemical, biological, and physical properties, 4, 5 including pressure, P, which has been obtained from the quality factor, Q, and the resonance frequency of driven cantilevers in fluid. For example, Bianco et al 6 examined driven microfabricated cantilevers, then related the quality factor and the resonance frequency to pressure using theories from Christian, 7 Bao et al, 8 and Hosaka et al 9 Bianco et al showed that the quality factor is inversely proportional to pressure in the molecular region, and inversely proportional to the square root of pressure in a) Author to whom correspondence should be addressed. Electronic mail:…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever

Seo

Paul

2012

Review of Scientific Instruments

View full text Add to dashboard Cite

). Seo, Dongjin; Paul, Mark R.; Ducker, William A., "A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever," Rev. Sci. Instrum. 83, 055005 (2012); http://dx.doi.org/10.1063/1.4717678 REVIEW OF SCIENTIFIC INSTRUMENTS 83, 055005 (2012) A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever We describe a gas-density gauge based on the analysis of the thermally-driven fluctuations of an atomic force microscope (AFM) cantilever. The fluctuations are modeled as a ring-down of a simple harmonic oscillator, which allows fitting of the resonance frequency and damping of the cantilever, which in turn yields the gas density. The pressure is obtained from the density using the known equation of state. In the range 10-220 kPa, the pressure readings from the cantilever gauge deviate by an average of only about 5% from pressure readings on a commercial gauge. The theoretical description we use to determine the pressure from the cantilever motion is based upon the continuum hypothesis, which sets a minimum pressure for our analysis. It is anticipated that the cantilever gauge could be extended to measure lower pressures given a molecular theoretical description. Alternatively, the gauge could be calibrated for use in the non-continuum range. Our measurement technique is similar to previous AFM cantilever measurements, but the analysis produces improved accuracy.

show abstract

“…Under UHV conditions, air damping is eliminated. 17 A lower bound on dissipation from the measuring system can be determined by carrying out a measurement on a high Q structure.…”

Section: Dissipation In Microcantileversmentioning

confidence: 99%

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

et al. 2009

View full text Add to dashboard Cite

We have characterized mechanical properties of ultrananocrystalline diamond UNCD thin films grown using the hot filament chemical vapor deposition HFCVD technique at 680 °C, significantly lower than the conventional growth temperature of 800 °C. The films have 4.3% sp2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, 1 m thick, exhibit a net residual compressive stress of 3701 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 8382 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum UHV conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 79030 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.0570.038. The quality factors Q of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD resonators. We have characterized mechanical properties of ultrananocrystalline diamond ͑UNCD͒ thin films grown using the hot filament chemical vapor deposition ͑HFCVD͒ technique at 680°C, significantly lower than the conventional growth temperature of ϳ800°C. The films have ϳ4.3% sp 2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, ϳ1 m thick, exhibit a net residual compressive stress of 370Ϯ 1 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 838Ϯ 2 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum ͑UHV͒ conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 790Ϯ 30 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.057Ϯ 0.038. The quality factors ͑Q͒ of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD re...

show abstract

Silicon resonant microcantilevers for absolute pressure measurement

Cited by 81 publications

References 27 publications

Unified theory of gas damping of flexible microcantilevers at low ambient pressures

Unified theory of gas damping of flexible microcantilevers at low ambient pressures

A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

Contact Info

Product

Resources

About