Flexible
micro-light-emitting diodes (f-μLEDs) have been
regarded as an attractive light source for the next-generation human–machine
interfaces, thanks to their noticeable optoelectronic performances.
However, when it comes to their practical utilizations fulfilling
industrial standards, there have been unsolved reliability and durability
issues of the f-μLEDs, despite previous developments in the
high-performance f-μLEDs for various applications. Herein, highly
robust flexible μLEDs (f-HμLEDs) with 20 × 20 arrays,
which are realized by a siloxane-based organic–inorganic hybrid
material (SHM), are reported. The f-HμLEDs are created by combining
the f-μLED fabrication process with SHM synthesis procedures
(i.e., sol–gel reaction and successive photocuring). The outstanding
mechanical, thermal, and environmental stabilities of our f-HμLEDs
are confirmed by a host of experimental and theoretical examinations,
including a bending fatigue test (105 bending/unbending
cycles), a lifetime accelerated stress test (85 °C and 85% relative
humidity), and finite element method simulations. Eventually, to demonstrate
the potential of our f-HμLEDs for practical applications of
flexible displays and/or biomedical devices, their white light emission
due to quantum dot-based color conversion of blue light emitted by
GaN-based f-HμLEDs is demonstrated, and the biocompatibility
of our f-HμLEDs is confirmed via cytotoxicity and cell proliferation
tests with muscle, bone, and neuron cell lines. As far as we can tell,
this work is the first demonstration of the flexible μLED encapsulation
platform based on the SHM, which proved its mechanical, thermal, and
environmental stabilities and biocompatibility, enabling us to envisage
biomedical and/or flexible display applications using our f-HμLEDs.