2002
DOI: 10.1364/oe.10.001485
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Simple and efficient technique for evaluating the optical losses from surface scattering and volume attenuation in a thin film

Abstract: We present a simple and efficient technique for evaluating the optical losses of a planar film by use of a quasi-waveguide configuration and a prism film coupler configuration. The technique can separate two contributions to optical loss: that from the surface scattering caused by the roughness of surface and that from volume losses including volume scattering and volume absorption.

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Cited by 5 publications
(3 citation statements)
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“…The measured data of the SCNN film corresponding to the scattered light intensity as a function of propagation distance for the TE 0 mode are shown in figure 5, from which, according to equation (2), the propagation loss δ is calculated to be about 1.7 dB cm −1 . In the optical loss measurement using couple prism, as discussed in [22], the loss can be arisen from surface scattering and volume attenuation, which are determined by film roughness and film quality (orientation and defect), respectively. Generally speaking, volume attenuation has a stronger influence on low orders of mode than surface scattering [22].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The measured data of the SCNN film corresponding to the scattered light intensity as a function of propagation distance for the TE 0 mode are shown in figure 5, from which, according to equation (2), the propagation loss δ is calculated to be about 1.7 dB cm −1 . In the optical loss measurement using couple prism, as discussed in [22], the loss can be arisen from surface scattering and volume attenuation, which are determined by film roughness and film quality (orientation and defect), respectively. Generally speaking, volume attenuation has a stronger influence on low orders of mode than surface scattering [22].…”
Section: Resultsmentioning
confidence: 99%
“…In the optical loss measurement using couple prism, as discussed in [22], the loss can be arisen from surface scattering and volume attenuation, which are determined by film roughness and film quality (orientation and defect), respectively. Generally speaking, volume attenuation has a stronger influence on low orders of mode than surface scattering [22]. Despite the fact that our SCNN film shows a relatively large rms of 8.9 nm (this could probably be further improved by adjusting the fabrication parameters), an acceptable optical loss value is still obtained due to the excellent epitaxial orientation of the integrated films.…”
Section: Resultsmentioning
confidence: 99%
“…The angular location of the modes depends only on the film thickness and refractive index. The thickness and refractive index of the film are therefore, can be calculated from the measured angles [10]. Propagation Loss Measurement.…”
Section: Sample Characterizationsmentioning
confidence: 99%