“…The sputtered ions are analyzed by measuring their kinetic energy using an electric field and an aperture, and their mass is determined through time-of-flight, magnetic sector, or quadrupole mass spectrometry. For quantitative measurements, SIMS needs reference samples [138]; however, by using Cs þ as the primary ion and by looking at the secondary cluster ions of matrix-Cs þ , the measurements can lead to semi-quantitative results with a minor number of reference samples [138]. If in addition to Na, K is to be measured, then O 2 þ needs to be used as primary ions.…”