2005
DOI: 10.1016/j.vacuum.2005.01.083
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SIMS investigation of nitride coatings

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Cited by 11 publications
(1 citation statement)
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“…GD-MS is widely used for the characterization of various solid materials both in bulk and depth resolved analysis. [19][20][21] Comparisons of GD-MS and SIMS analyses of solar cell silicon, 22 and GD-MS, SIMS and Auger spectroscopy analyses of TiN and CrN hard coatings 23,24 have been presented.…”
Section: Introductionmentioning
confidence: 99%
“…GD-MS is widely used for the characterization of various solid materials both in bulk and depth resolved analysis. [19][20][21] Comparisons of GD-MS and SIMS analyses of solar cell silicon, 22 and GD-MS, SIMS and Auger spectroscopy analyses of TiN and CrN hard coatings 23,24 have been presented.…”
Section: Introductionmentioning
confidence: 99%