2010
DOI: 10.1117/12.867524
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Simulation analysis and structure optimization of the polishing disc with the tiny-grinding wheel cluster based on MR effect

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“…To solve this problem, many scholars have proposed new types of magnetorheological finishing devices. Based on the principle of magnetorheological finishing, Yan et al proposed a new method of cluster magnetorheological effect polishing using cluster-distributed magnets to form cluster-type flexible polishing pads [6][7][8]. It has realized the high-precision processing of wafers and YAG ceramics.…”
Section: Introductionmentioning
confidence: 99%
“…To solve this problem, many scholars have proposed new types of magnetorheological finishing devices. Based on the principle of magnetorheological finishing, Yan et al proposed a new method of cluster magnetorheological effect polishing using cluster-distributed magnets to form cluster-type flexible polishing pads [6][7][8]. It has realized the high-precision processing of wafers and YAG ceramics.…”
Section: Introductionmentioning
confidence: 99%