Simulation and fabrication of SiO2/graded-index TiO2 antireflection coating for triple-junction GaAs solar cells by using the hybrid deposition process

Liu, Jheng-Jie; Ho, Wen-Jeng; Lee, Yi-Yu; Chang, Chia‐Ming

doi:10.1016/j.tsf.2014.05.024

Cited by 19 publications

(9 citation statements)

References 17 publications

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“… 1 Amongst metal oxides, TiO 2 is an interesting candidate due to its fairly high RI (n≈2.4–2.9) and transparency in the visible-NIR wavelength spectrum. 13 - 17 TiO 2 (nano)materials have been utilized in solar cell devices such as dye-sensitized solar cells, polymer-inorganic hybrid solar cells, quantum dot-sensitized solar cells, and perovskite solar cells, 13 heterojunction solar cells with electron-selective TiO 2 contact, 18 photo electrochemical water splitting, 19 as part of (graded-index) anti-reflection layer coating(s), 20 - 26 quasi-periodic multilayer ARCs, 27 light manipulation metasurfaces, 28 - 36 and for light extraction in light emitting diodes (LEDs) 37 - 39 .…”

Section: Introductionmentioning

confidence: 99%

“…utilized in solar cell devices such as dye-sensitized solar cells, polymer-inorganic hybrid solar cells, quantum dot-sensitized solar cells, and perovskite solar cells, 13 heterojunction solar cells with electron-selective TiO 2 contact, 18 photo electrochemical water splitting, 19 as part of (graded-index) anti-reflection layer coating(s), [20][21][22][23][24][25][26] quasi-periodic multilayer ARCs, 27 light manipulation metasurfaces, [28][29][30][31][32][33][34][35][36] and for light extraction in light emitting diodes (LEDs) [37][38][39] .…”

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confidence: 99%

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Embossed Mie resonator arrays composed of compacted TiO2 nanoparticles for broadband anti-reflection in solar cells

Visser

Chen

Désières

et al. 2020

Sci Rep

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Mie resonator arrays formed by embossing titanium dioxide (tio 2) nanoparticles (nps) from solution are investigated as optical coatings for anti-reflection applications. Compacted nanoparticle assemblies offer unique possibilities to tailor the effective refractive index (RI). Here, we demonstrate a simple table-top, low pressure, and low temperature method to fabricate structured optical coatings. TiO 2 nanostructures in the form of nanodisks support Mie resonances in the visible wavelength spectrum and exhibit strong forward scattering into the high index substrates, making them suitable as broadband anti-reflection coatings for solar cells. TiO 2 np-based nanodisk arrays are designed, fabricated, and characterized regarding their anti-reflection properties on Si, GaAs, and InP substrates and solar cells. Detailed finite-difference time-domain simulations are performed to optimize the tio 2 NP-based Mie resonator arrays for the broadband anti-reflection as well as to explain the measured reflectance spectra. The solar-weighted reflectance is used as a figure of merit (FoM). TiO 2 nanodisk arrays on Si show a FoM of ~ 7% in the 400-1,100 nm wavelength spectrum; similar values are obtained for GaAs and InP substrates. TiO 2 nanodisk arrays embossed directly on prefabricated planar single-junction Si, GaAs, and InP solar cells result in an appreciable increase (~ 1.3 times) in the short-circuit current densities. Recently, sub-wavelength dielectric Mie resonator arrays have been reported for applications such as omnidirectional broadband anti-reflection. 1,2 Si nanodisk arrays on Si substrates show low average surface reflectance over the visible-NIR wavelength region. 3 Surface reflection reduction 4-7 plays a major part in increasing the performance of solar cells. For inorganic semiconductor solar cell materials, e.g., Si and III-Vs, due to their high refractive indices (~ 3-4) the reflectance loss (~ 30-40%) is significant. To reduce this, the solar cell surface can either be structured directly or an additional (structured) optical coating can be used. Direct structuring of solar cells can degrade its performance due to process induced defects and surface recombination and invariably requires additional passivation procedures/coatings. Such issues become more significant for thin film solar cells (thickness of ~ 2 µm or less). These limitations may be overcome by depositing a structured optical layer instead. Anti-reflection coatings (ARCs) include commonly used traditional thin-film dielectrics (e.g., silicon dioxide (SiO 2) and silicon nitride (Si x N y)), metal nanoparticles, 8,9 and dielectric nanostructures 3,10,11. While thin film dielectrics are easier to fabricate, multilayers are often required to achieve broadband anti-reflection. Metallic nanoparticles suffer from parasitic absorption in the metal and the resonances are highly sensitive to the RI of the matrix below or around the nanoparticles. 12 High-index dielectric (e.g., Si) Mie resonator arrays placed on Si or substrates with similar refract...

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Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

Embossed Mie resonator arrays composed of compacted TiO2 nanoparticles for broadband anti-reflection in solar cells

Visser

Chen

Désières

et al. 2020

Sci Rep

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“…AR coating is used to reduce or eliminate light reflection on the substrate surface, which is widely used in various applications, such as optical devices [25, 26], solar cells [27] (silicon [28], GaAs [29], Cu(In,Ga)Se 2 [30], dye‐sensitised solar cells (DSSC) [31]), and photocatalyst [32]. The principle of AR coating is based on the destructive interference of reflected light from interfaces between air and a film; one film and another film in the case of multilayered film coating; or a film and the substrate.…”

Section: Introductionmentioning

confidence: 99%

Optical properties of TiO ₂ nanorod/PMMA bilayered film and the application for anti‐reflection

Yudoyono

Pramono

Zainuri

et al. 2017

Micro & Nano Letters

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TiO 2 /Poly(methyl methacrylate) (PMMA) bilayered films have been prepared by spin coating technique on the glass substrate. The nanorod-structured TiO 2 prepared by a coprecipitation method was used. The structure and morphology were tested by X-ray diffraction (XRD), scanning electron microscopy, and atomic force microscopy (AFM). The optical properties and the anti-reflection (AR) coating performance were evaluated by UV-Vis spectrometer. The XRD pattern has shown that the TiO 2 particles have the nanorods structure and the rutile phase. The AFM analysis showed that the layer of TiO 2 nanorods has formed a colloidal crystal with an amorphous structure having a smooth surface. Based on the absorption spectra of a single layer TiO 2 , the optical band gap (E g) between 3.65-3.70 eV and the Urbach energy (E u) between 204-255 meV can be determined. The maximum transmittance of TiO 2 /PMMA bilayered film at a normal incident light can reach up to 98.5%.

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“…Compared to physical vapor deposition (PVD) method, it is more suitable to prepare multilayer films with different refractive index by PECVD method. The average reflectance for double-layer ARCs are lower over a broader wavelength range than for a single-layer ARC, because single-layer ARC has only minimal point of reflectance [17][18]. With these requirements, double-layer SixOy ARCs with gradient refractive index not only decrease electrical recombination effectively, but also enhance optical antireflection strongly [19][20].…”

Section: Introductionmentioning

confidence: 99%

Characterization and simulation on antireflective coating of amorphous silicon oxide thin films with gradient refractive index

Huang

Jin

et al. 2016

Superlattices and Microstructures

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The optical reflective properties of silicon oxide (SixOy) thin films with gradient refractive index are studied both theoretically and experimentally. The thin films are widely used in photovoltaic as antireflective coatings (ARCs). An effective finite difference time domain (FDTD) model is built to find the optimized reflection spectra corresponding to structure of SixOy ARCs with gradient refractive index. Based on the simulation analysis, it shows the variation of reflection spectra with gradient refractive index distribution. The gradient refractive index of SixOy ARCs can be obtained in adjustment of SiH4 to N2O ratio by plasma-enhanced chemical vapor deposition (PECVD) system. The optimized reflection spectra measured by UV-visible spectroscopy confirms to agree well with that simulated by FDTD method.

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Simulation and fabrication of SiO2/graded-index TiO2 antireflection coating for triple-junction GaAs solar cells by using the hybrid deposition process

Cited by 19 publications

References 17 publications

Embossed Mie resonator arrays composed of compacted TiO2 nanoparticles for broadband anti-reflection in solar cells

Embossed Mie resonator arrays composed of compacted TiO2 nanoparticles for broadband anti-reflection in solar cells

Optical properties of TiO ₂ nanorod/PMMA bilayered film and the application for anti‐reflection

Characterization and simulation on antireflective coating of amorphous silicon oxide thin films with gradient refractive index

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Simulation and fabrication of SiO2/graded-index TiO2 antireflection coating for triple-junction GaAs solar cells by using the hybrid deposition process

Cited by 19 publications

References 17 publications

Embossed Mie resonator arrays composed of compacted TiO2 nanoparticles for broadband anti-reflection in solar cells

Embossed Mie resonator arrays composed of compacted TiO2 nanoparticles for broadband anti-reflection in solar cells

Optical properties of TiO 2 nanorod/PMMA bilayered film and the application for anti‐reflection

Characterization and simulation on antireflective coating of amorphous silicon oxide thin films with gradient refractive index

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Optical properties of TiO ₂ nanorod/PMMA bilayered film and the application for anti‐reflection