Simulation-based assessment of batching heuristics in semiconductor manufacturing

Monch,; Habenicht,

doi:10.1109/wsc.2003.1261570

Cited by 17 publications

(11 citation statements)

References 12 publications

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“…However, an assumption was made on the look-ahead parameter rule, that is, all jobs are available at time zero. Mönch and Habenicht (2003) considered future job arrivals and modified Equation (1):…”

Section: No Yesmentioning

confidence: 99%

Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals

Jia

Jiang

2013

International Journal of Production Research

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In this paper, a real-time closed loop control dispatching heuristic (RCLC) algorithm is proposed to address the scheduling problem of parallel batch machines with incompatible job families, limited waiting time constraints, re-entrant flow and dynamic arrivals in the diffusion and oxidation areas of a semiconductor wafer fabrication system (SWFS), which is known to be strongly NP-hard. The basis of this algorithm is the information of lots in the buffer when the parallel batch machines are idle and available. In RCLC, if the number of any family lots is less than the maximum batch size, the dispatching heuristic can be seen as a pull-pull-push-push (P 4 ) strategy; otherwise, a genetic algorithm (GA). A lookitself strategy, P 4 strategy and GA can build a closed loop control system. The experiments are implemented on the Petri nets-based real-time scheduling simulation platform of SWFS, and demonstrate the effectiveness of our proposed method.

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Section: No Yesmentioning

confidence: 99%

Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals

Jia

Jiang

2013

International Journal of Production Research

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“…However, as traffic intensity increases, use of downstream information can actually lead to longer delays. Mo¨nch and Habenicht (2003) investigate the batching problem in the environment of parallel batching machines and extend the static ATC dispatching rule (a static rule developed by Vepsalainen and Morton (1987) for static parallel batching machine environment to minimise total weighted tardiness, TWT) by considering future lot arrivals, and develop a dynamic batch dispatching heuristic (DBDH). The time window (scheduling horizon), Dt, is a certain portion of the average processing time of the waiting lots.…”

Section: Minimum Cost Rate Heuristicmentioning

confidence: 99%

“…The batch index calculation and batch formation mechanism are very similar to the case of the DBDH rule in Mo¨nch and Habenicht (2003) with consideration of sequence-dependent setup times. Since all of the global rules presented in this study utilise waiting time estimates at different processing steps for a job, it is clear that the efficiency of the rules relies largely on the accuracy of these estimates.…”

Section: Dynamic Batch Dispatching Heuristicmentioning

confidence: 99%

A survey of dispatching rules for operational control in wafer fabrication

Sarin

Varadarajan

Wang

2010

Production Planning & Control

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Production scheduling in semiconductor wafer fabs is a non-trivial task owing to the complexity of wafer fabrication. Dispatching rules are the most commonly used tools for shop floor control in this industry. Over the years, advanced dispatching rules, capable of impacting multiple performance measures and utilising both upstream and downstream information in assigning lot priorities, have been introduced. This article aims to provide an overview of these rules and explores the effectiveness of their performance as they pertain to different areas in a wafer fab. Based on this overview, several future directions on developing new dispatching rules are also proposed.

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“…Among the complex operations involved in the fabrication of a wafer, the diffusion phase is of critical importance since the batching decisions that are involved may affect the performance of the entire wafer fab [ICN + 03,MH03]. This is also the case in the ATMEL fabrication unit of Rousset (France).…”

Section: Introductionmentioning

confidence: 99%

“…As for the global problem, batching and scheduling in diffusion areas is mainly performed in the literature by dispatching rules. In [ICS + 03] and [MH03], the authors propose to use a dispatching rule to batch the operations and a genetic algorithm to assign the batches to equipment. In [MFC02], a scheduling problem in semiconductor manufacturing related to the one tackled in this paper is solved by a modified shifting bottleneck heuristic [ABZ88].…”

Section: Introductionmentioning

confidence: 99%

A Batch Optimization Solver for Diffusion Area Scheduling in Semiconductor Manufacturing

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Pérès

Derreumaux

et al. 2006

IFAC Proceedings Volumes

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Simulation-based assessment of batching heuristics in semiconductor manufacturing

Cited by 17 publications

References 12 publications

Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals

Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals

A survey of dispatching rules for operational control in wafer fabrication

A Batch Optimization Solver for Diffusion Area Scheduling in Semiconductor Manufacturing

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