Simulation-based development and characterization of a CCD architecture for 1 million frames per second

Poggemann, D.; Ruckelshausen, Arno; Etoh, Takeharu; Theuwissen, Albert; Bosiers, Jan T.; Mutoh, Hideki; Kondo, Yasushi

doi:10.1117/12.476794

Cited by 2 publications

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“…The p-well of each pixel has two holes: a large one at the collection gate is to introduce photoelectrons to the storage CCD channels on the front side; a small one at the drain to collect five percent of the generated photo-electrons to monitor in real time a sudden change in the average brightness, which serves as an index for occurrence of a target event. (4) Curved CCD design: Since the very early development stage of the CCD-ISIS group, a curved design has been introduced to transfer photoelectrons smoothly and swiftly [17]. (5) Microlens array: In design of common imagers, microlens arrays are mainly used to increase the nominal fill factor.…”

Section: Technologies To Achieve Ultra-high Frame Ratementioning

confidence: 99%

A Novel MEMS Respiratory Flow Sensor

2010

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Our experience in the design of an ultra-high speed image sensor targeting the theoretical maximum frame rate is summarized. The imager is the backside illuminated in situ storage image sensor (BSI ISIS). It is confirmed that the critical factor limiting the highest frame rate is the signal electron transit time from the generation layer at the back side of each pixel to the input gate to the in situ storage area on the front side. The theoretical maximum frame rate is estimated at 100 Mega-frames per second (Mfps) by transient simulation study. The sensor has a spatial resolution of 140,800 pixels with 126 linear storage elements installed in each pixel. The very high sensitivity is ensured by application of backside illumination technology and cooling. The ultra-high frame rate is achieved by the in situ storage image sensor (ISIS) structure on the front side. In this paper, we summarize technologies developed to achieve the theoretical maximum frame rate, including: (1) a special p-well design by triple injections to generate a smooth electric field backside towards the collection gate on the front side, resulting in much shorter electron transit time; (2) design technique to reduce RC delay by employing an extra metal layer exclusively to electrodes responsible for ultra-high speed image capturing; (3) a CCD specific complementary on-chip inductance minimization technique with a couple of stacked differential bus lines.

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Section: Technologies To Achieve Ultra-high Frame Ratementioning

confidence: 99%

A Novel MEMS Respiratory Flow Sensor

2010

View full text Add to dashboard Cite

show abstract

“…The p-well of each pixel has two holes: a large one at the collection gate is to introduce photoelectrons to the storage CCD channels on the front side; a small one at the drain to collect five percent of the generated photo-electrons to monitor in real time a sudden change in the average brightness, which serves as an index for occurrence of a target event. Curved CCD design: Since the very early development stage of the CCD-ISIS group, a curved design has been introduced to transfer photoelectrons smoothly and swiftly [ 17 ]. Microlens array: In design of common imagers, microlens arrays are mainly used to increase the nominal fill factor.…”

Section: Technologies To Achieve Ultra-high Frame Ratementioning

confidence: 99%

“…Curved CCD design: Since the very early development stage of the CCD-ISIS group, a curved design has been introduced to transfer photoelectrons smoothly and swiftly [ 17 ].…”

Section: Technologies To Achieve Ultra-high Frame Ratementioning

confidence: 99%

“…Among these technologies, the wafer with double-epi layers [ 16 ], the curved CCD design method [ 17 ] and an optimization method of wiring for driving voltage transfer to minimize RC delay [ 18 ] have been explained elsewhere. The present paper only describes the effectiveness of the three-layer p-well design, the microlens array and the CCD-specific complementary bus-line design in increasing the frame rate.…”

Section: Technologies To Achieve Ultra-high Frame Ratementioning

confidence: 99%

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