Simulation of Dual-Electrode Capacitively Coupled Plasma Discharges

In this paper, we give a detailed description of a novel plasma chamber—the Zyflex chamber—that has been specifically designed for complex/dusty plasma research under reduced gravitational influence as realized during parabolic flight or aboard the International Space Station. The cylindrical, radio-frequency driven discharge device includes a variety of innovations that, for example, allow us to flexibly adjust plasma parameters and its volume via enhanced plasma generation control and a movable, multi-segmented electrode system. The new complex/dusty plasma research tool also supports, due to its overall increased size compared to former space based complex plasma experiments such as PKE-Nefedov or PK-3 Plus, much larger particle systems. Additionally, it can be operated at much lower neutral gas pressures, thus reducing the damping of particle motion considerably. Beyond the technical description and particle-in-cell simulation based characterization of the plasma vessel, we show sample results from experiments performed with this device in the laboratory as well as during parabolic flights, both of which clearly demonstrate the new quality of complex/dusty plasma research that becomes accessible with this new plasma device.

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“Zyflex”: Next generation plasma chamber for complex plasma research in space

Knapek

Konopka

Mohr

et al. 2021

Review of Scientific Instruments

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Experimental studies and COMSOL 1-D simulation in Ar capacitively coupled plasmas

Datta,

Han,

Kumar

et al. 2024

AIP Advances

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This work systematically studies a capacitively coupled plasma (CCP) source using experiments and 1-D COMSOL simulations relevant to Ar plasmas. Two radio frequency compensated Langmuir probes (LPs) and optical emission spectroscopy (OES) were purposefully used to measure the plasma parameters, and the experimental results were compared with those of simulations. We studied the axial variation of plasma parameters using an axial LP between the power and ground electrodes of the CCP at various operating pressures ranging from 10 to 150 mTorr. The electron density showed a gradual increase in its value with rising pressures. In addition, we employed a radial LP at the axial location L = 4 cm from the surface of the power electrode to measure the plasma parameters and compare these data with those of the axial LP and simulations. The variations of plasma potential measured by the radial LP showed an opposite trend of variation to those of simulations and the axial LP at pressures 10–60 mTorr, which is attributed to the plasma diffusion at low pressures. LP and OES measurements and simulation data suggest stochastic heating that generates high electron temperatures at low pressures. In addition, data revealed that the high-density plasma generation at high pressures could be due to the effects of both collisional heating and stochastic heating. Analysis showed that electrons could gain energy from the strong field regime of the sheath closed to the electrodes, which has a similar variation to electron temperature. The results of simulations have shown excellent agreement with experiments, and this work has the basis for plasma applications like plasma-enhanced chemical vapor deposition.

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Investigation on capacitively coupled He discharges with a structured electrode and effective design of a high-density and uniform plasma

Liang,

Li,

Zhang

et al. 2024

J. Phys. D: Appl. Phys.

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In this paper, a fluid model is performed to investigate the effect of a structured electrode on capacitively coupled helium discharges operated at 13.56 MHz with 100 V peak-to-peak voltage, and 200 Pa. Compared to discharges with conventional planar electrodes, it is found that the plasma density produced by the structured electrode is raised by 28.5% to 161.2% from 1.86×1015/m3 as the trench size (i.e., width and depth) in structured electrode varies. The results also indicate that the trench dimensions have a great effect on the plasma characteristics under the operating conditions in this study. With the increase of trench width, the plasma density below the trench region increases at trench widths lower than 22 mm, after which the opposite trend is observed. As the groove depth varies from 5 mm to 25 mm, the plasma density increases monotonously from 2.46×1015/m3 to 4.86×1015/m3. Based on the results above, a modified ring-shaped structured electrode (MRSE) is proposed to successfully generate a large-area uniform and high-density plasma by adjusting the trench dimensions, position and number according to the discharge conditions. Compared to the flat electrode case, the plasma density and radial uniformity rise to 94.2% and 3.25×1015 /m3 from 92.2% and 2.49×1015 /m3, respectively, with the adoption of MRSE. The simulation results also validate potential of the structured electrode as an effective tool in improvement of plasma processing.

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Simulation of Dual-Electrode Capacitively Coupled Plasma Discharges

Cited by 3 publications

References 30 publications

“Zyflex”: Next generation plasma chamber for complex plasma research in space

“Zyflex”: Next generation plasma chamber for complex plasma research in space

Experimental studies and COMSOL 1-D simulation in Ar capacitively coupled plasmas

Investigation on capacitively coupled He discharges with a structured electrode and effective design of a high-density and uniform plasma

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