He, Ne, Ar, and Kr ‘inert’ gases are separately quenched in CZ dislocation‐f ree (110)‐Si wafers (from ≃ 610 °C to room temperature, 28 °C) using an X‐r ay oven. White synchrotron radiation section topographs (WSRST's) show point defect precipitation/clusters after each quench and a deterioration in crystal (pendellösung) perfection. Relatively small cluster concentrations are observed for Ne and Ar. The experiment simulates changes in the perfection of first WSR monochromator diffracting surfaces when housed in different ‘inert’ gases after high intensity (wiggler/undulator) beam switch‐o ff.