Simulation of RF plasma flowing at low pressure

Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field

“…Different models of jet inductive coupled RF discharge at low pressure have been considered in our previous studies [12][13][14][15][16]. Direct Monte Carlo simulation (DSMC) [17] is used for simulation of carrier gas flow in these studies.…”

“…Direct Monte Carlo simulation (DSMC) [17] is used for simulation of carrier gas flow in these studies. e dynamics of a carrier gas was considered in [12,13], taking into account the internal distributed heat source due to the transfer of energy from the electron gas. e pressure, the temperature, and the velocity of carrier gas both in the undisturbed flow and in the flow with a sample are calculated.…”

“…e mathematical models considered in [12][13][14][15] are not self-consistent because the distribution of the electromagnetic field was approximated by the experimental data from [6]. Distribution of the RF electromagnetic field in the lowpressure inductive coupled RF plasma jet is calculated in [16] using the Biot-Savart law.…”

“…In addition, studying [12][13][14][15][16] is performed under the assumption of quasi-neutral plasma flow. It is known that a positive sheath is formed near the electrodes in capacitive coupled RF discharges.…”

Problem of radio-frequency discharge at atmospheric pressure in local statement

“…Plasma is effectively used in the field of nanotechnology, for creating and modify in nanostructures (e.g., for the treatment of materials in order to improve durability and reliability of machinery, creating a light and strong polymer composites, polyethylene plastics, nanopowders of metals and their composites etc.) [1,2,22,23,28,29]. This paper is further work [27] where the model of interaction between CCRFD and a sample allowing to calculate characteristics of the discharge in an inter-electrode is given.…”