Simultaneous planar free and forced vibrations analysis of an electrostatically actuated beam oscillator

Bhushan, Anand; Inamdar, Mandar M.; Pawaskar, Dnyanesh N.

doi:10.1016/j.ijmecsci.2014.03.003

Cited by 12 publications

(3 citation statements)

References 30 publications

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“…( 9) and ignored other parametric excitation and second harmonic terms during solving single-mode ROM in this paper. This is because, only first direct harmonic excitation is dominant in primary resonance near first natural frequency [34]. We show this observation here in Figs.…”

Section: Reduced Order Modellingsupporting

confidence: 55%

Effects of DC voltage on initiation of whirling motion of an electrostatically actuated nanowire oscillator

Bhushan¹,

Inamdar²,

Pawaskar³

2013

Preprint

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Planar driven nanowire oscillators are susceptible to undergo whirling motion due to coupling between flexural planar and nonplanar modes of vibration. This investigation is concerned with planar to whirling motion transition in the oscillation of an electrostatically actuated nanowire, which is pre-deflected due to applied DC voltage. We have derived dynamical equations of motion using Euler-Bernoulli beam theory and Galerkin formulation as reduced order model of the governing coupled partial differential equations. The dynamical equations have been solved using second-order averaging method and the averaging solution has been validated by comparing with the numerical solution of the reduced order model. Further, planar to whirling motion transition has been investigated by studying qualitative changes in resonance curves with variation of electrostatic actuation. In this paper, we provide a simple analytical condition which takes into account the effects of DC voltage for prediction of initiation of whirling motion. Our main observation of the present investigation is that DC voltage can tune the initiation pattern of the whirling motion and change the qualitative nature of resonance curves.

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Section: Reduced Order Modellingsupporting

confidence: 55%

Effects of DC voltage on initiation of whirling motion of an electrostatically actuated nanowire oscillator

Bhushan¹,

Inamdar²,

Pawaskar³

2013

Preprint

Self Cite

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“…Clamped-clamped microbeams are used numerously in MEMS as solo components in devices or as spring components to support and add stiffness to other microstructures [1][2][3][4][5]. They are commonly fabricated with unavoidable initial curvature due to stress gradients and other imperfections.…”

Section: Introductionmentioning

confidence: 99%

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Bataineh

Younis

2014

Microsyst Technol

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We present an investigation into the static and dynamic behavior of an electrostatically actuated clamped-clamped polysilicon microbeam resonator accounting for its fabrication imperfections, which are commonly encountered in similar microstructures. These are mainly because of the initial deformation of the beam due to stress gradient and its flexible anchors. First, we show experimental data of the microbeam when driven electrically by varying the amplitude and frequency of the voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Theoretical investigation is then conducted to model the microbeam, and hence, interpret the experimental data. We solve the Eigen value problem governing the natural frequencies analytically. We then utilize a Galerkin-based procedure to derive a reduced order model, which is then used to simulate both the static and dynamic responses. To achieve good matching between theory and experiment, we show that the exact profile of the deformed beam needs to be utilized in the reduced order model, as measured from the optical profiler, combined with a shooting technique simulation, which is capable of tracing the resonant frequency branches under very-low damping conditions.

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“…The CNT is driven by DC and AC voltages between the CNT and plate electrode or electrodes [3]. The deflection of carbon nanotubes occurs under the attractive electrostatic and van der Waals forces.…”

Section: Introductionmentioning

confidence: 99%

Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect

Caruntu

Luo

2016

Meccanica

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In this work the voltage response of primary resonance of electrostatically actuated single wall carbon nano tubes (SWCNT) cantilevers over a parallel ground plate is investigated. Three forces act on the SWCNT cantilever, namely electrostatic, van der Waals and damping. While the damping is linear, the electrostatic and van der Waals forces are nonlinear. Moreover, the electrostatic force is also parametric since it is given by AC voltage. Under these forces the dynamics of the SWCNT is nonlinear parametric. The van der Waals force is significant for values less than 50 nm of the gap between the SWCNT and the ground substrate. Reduced order model method (ROM) is used to investigate the system under soft excitation and weak nonlinearities. The voltageamplitude response and influences of parameters are reported for primary resonance (AC near half natural frequency).

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Simultaneous planar free and forced vibrations analysis of an electrostatically actuated beam oscillator

Cited by 12 publications

References 30 publications

Effects of DC voltage on initiation of whirling motion of an electrostatically actuated nanowire oscillator

Effects of DC voltage on initiation of whirling motion of an electrostatically actuated nanowire oscillator

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect

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