Simultaneous two-step phase-shifting lateral shearing interferometry for aspherical surface based on an orthogonal shear displacer

Zhu, Yahui; Tian, Anmin; Wang, Hongjun; Liu, Bingcai; Zhu, Xueliang; Yuan, Hang

doi:10.1088/2631-8695/ac8f1d

Cited by 4 publications

(2 citation statements)

References 29 publications

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“…To overcome these shortcomings in the existing QWLSI, and improve the measurement precision of wavefront under test. According to the contribution of the previous literature on the realization of simultaneous two-step phase-shifting lateral shearing interferometry by two birefringent crystals [15], the two-step phase-shifting lateral shearing interferometry for aspheric measurement with a certain amount of phase-shifting can be completed through a micro-polarizer with transmission polarization directions of 0° and 90°.…”

Section: Introductionmentioning

confidence: 99%

Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry

Zhu,

Tian,

Liu

et al. 2024

J. Opt. Soc. Am. A

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Quadriwave lateral shearing interferometry (QWLSI) is based on double birefringent crystals of a beam displacer (DBCs-BD), which can generate the lateral shearing interference wavefront of four beams of overlapped replicas in the DBCs-BD orthogonal directions. When the replica waves are overlapped incident to the analyzer and the direction of the transmission axis is set as 45° or 135°, the QWLSI’s polarization interferogram can be obtained. This paper deduces the principle of QWLSI based on the DBCs-BD and presents the analysis of orthogonal error influence based on the DBCs-BD and the phase retrieval error of QWLSI when shear displacement by tilted incident on the DBCs-BD. In our investigation, we have established the correction range of the PBD’s orthogonal angle error is within −0.5∘−0.5∘, the maximum error in PV is 0.0012λ, and the maximum error in RMS is 1.3789×10−4λ in wavefront reconstruction. Moreover, when the testing light tilts to incident on the PBD in the range of −0.4∘−0.4∘, correction of the shear distance is used for wavefront reconstruction to achieve a high-precision wavefront testing result. Finally, the experiment shows that QWLSI based on the DBCs-BD exhibits feasibility and high precision.

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Section: Introductionmentioning

confidence: 99%

Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry

Zhu,

Tian,

Liu

et al. 2024

J. Opt. Soc. Am. A

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“…Lateral shearing interferometry is used in variety of applications [7][8][9]. These interferometers are compact in size and cost effective.…”

Section: Introductionmentioning

confidence: 99%

Investigations Towards the Measurement of Displacement using Lateral Shearing Interferometry and Fourier Fringe Analysis Technique

Disawal¹,

Thakur²,

Tiwari³

et al. 2023

J. Phys.: Conf. Ser.

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In the present communication we report the measurement of small displacement of reflecting surface (plane mirror) using wedge plate lateral shearing interferometry. With the help of simple mathematical analysis relation between specimen displacement and difference phase is undertaken. Fourier based fringe analysis technique is used for determination of difference phase. Theoretical and experimental investigations are carried out to check the sensitivity of the technique. The detailed discussion regarding sources of errors and uncertainty analysis is also incorporated and the expanded uncertainty is found to be ±0.00236mm. The technique is simple and can be used in industry environment.

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Multi-directional shearing synchronous polarization phase- shifting interferometer and its interferometry system experimental verification

zhu,

tian,

wang

et al. 2024

Preprint

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This paper explores a multi-directional shearing synchronous polarization phase-shifting interferometer utilizing a birefringent crystal displacer. This design effectively mitigates nonlinear issues and environmental influences commonly encountered in synchronous phase-shifting interferometry. Additionally, it facilitates the acquisition of shear wavefront information from multiple directions. By solving for the coefficients of the measured wavefront using multi-directional differential wavefront information, this system performs fitting coefficient to reconstruct the wavefront. The characteristics of crystal birefringence beam modulation, phase grating diffraction, and polarization phase-shifting array for synchronous phase-shifting interferometry are investigated based on the specific implementation methods of multi-directional shearing and synchronous polarization phase-shifting. Subsequently, the preprocessing method for the multi-directional shearing phase-shifting interferogram was presented, followed by a detailed explanation of the spatial position registration technique for the shearing interferogram and the calculation method of the shear amount. The construction system of the interferometer was experimentally tested using a spherical optical component and was compared with the test results obtained from ZYGO to verify its correctness and testing accuracy.

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Simultaneous two-step phase-shifting lateral shearing interferometry for aspherical surface based on an orthogonal shear displacer

Cited by 4 publications

References 29 publications

Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry

Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry

Investigations Towards the Measurement of Displacement using Lateral Shearing Interferometry and Fourier Fringe Analysis Technique

Multi-directional shearing synchronous polarization phase- shifting interferometer and its interferometry system experimental verification

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