2002
DOI: 10.1002/sia.1340
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Single‐crystal LiNbO3 surfaces processed in low‐temperature hydrogen plasma: XPS, REELS and AFM study

Abstract: Single crystals of lithium niobate, which is a widely used material in opto-electronics, holography, surface acoustic wave devices, etc., have been processed in a low-temperature plasma of radiofrequency discharge in hydrogen. The aim was to examine a new kind of surface modification of LiNbO 3 . The surface modification has been studied by XPS, reflection electron energy-loss spectroscopy (REELS) and atomic force microscopy (AFM). The XPS study via the Nb 3d spectral lineshape revealed the plasma effect: a de… Show more

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Cited by 8 publications
(1 citation statement)
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“…defects at the LiNbO 3 surface were investigated by photoelectron spectroscopy, instead (Cháb and Kubátová 1986). Surface lattice defects similar to those of ion implantation or metal ion doping have been created at the lithium niobate surface by plasma processing in an attempt to produce a new kind of surface modification (Turcicová et al 2002). More recently, high resolution AFM images taken in liquid environment have demonstrated the presence of atomic size point defects at the LiNbO 3 (0 0 0 1), as shown in figure 46.…”
Section: Summary and Perspectivesmentioning
confidence: 99%
“…defects at the LiNbO 3 surface were investigated by photoelectron spectroscopy, instead (Cháb and Kubátová 1986). Surface lattice defects similar to those of ion implantation or metal ion doping have been created at the lithium niobate surface by plasma processing in an attempt to produce a new kind of surface modification (Turcicová et al 2002). More recently, high resolution AFM images taken in liquid environment have demonstrated the presence of atomic size point defects at the LiNbO 3 (0 0 0 1), as shown in figure 46.…”
Section: Summary and Perspectivesmentioning
confidence: 99%