Single-crystal silicon micromirror array with polysilicon flexures

Kudrle, T.D.; Wang, Chuan Che; Bancu, Mirela G.; Hsiao, James C.; Pareek, A.; Waelti, M.; Kirkos, G.; Shone, T.; Fung, C.D.; Mastrangelo, Carlos H.

doi:10.1016/j.sna.2004.10.038

Cited by 21 publications

(9 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The residue stress limits the mirror size to approximately 1 mm, and the different thermal expansion coefficients between the mirror and the metal coating also cause the mirror curvature to change with temperature. Bulk-micromachined single-crystalline silicon micromirrors are often used in highport-count OXCs that require larger mirror size [46], [53]- [56].…”

Section: Three-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

View full text Add to dashboard Cite

Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

show abstract

Section: Three-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

View full text Add to dashboard Cite

show abstract

“…The single-crystal silicon micromirror developed by Intellisense uses a heavy gimbal structure as well. It can be clearly seen from the dynamic response of the mirror presented in [40] that natural frequencies in rotation about the x and y axis are not matched. More preciselly, the first two modes are placed at 75 Hz and 187.5 Hz [40].…”

Section: D Mems Micromirrors In Praxismentioning

confidence: 98%

“…It can be clearly seen from the dynamic response of the mirror presented in [40] that natural frequencies in rotation about the x and y axis are not matched. More preciselly, the first two modes are placed at 75 Hz and 187.5 Hz [40]. On the other hand, Glimmerglass developed a micromirror which uses a dramaticaly reduced gimbal structure [9] by comparing other solutions, and thus we can supposethat the natural frequencies will be similar (or equal).…”

Section: D Mems Micromirrors In Praxismentioning

confidence: 98%

“…It should be noted that some designs use elliptic micromirrors to improve the optical properties of the photonic switch (due to mutual position of micromirror arrays and fiber arrayssee Figure 3 -the elliptical micromirror appears to be circular to the light coming from the fiber array). For instance, Intellisense uses an elliptical micromirror [40], but in this case, the micromirror is prolonged in the way that natural frequencies are even more disbalanced.…”

Section: D Mems Micromirrors In Praxismentioning

confidence: 99%

See 1 more Smart Citation

MEMS optical switch: Switching time reduction

Plander

Stepanovsky

2016

Open Computer Science

View full text Add to dashboard Cite

Existing 3D MEMS-based optical switches offer good optical properties (low insertion loss, low crosstalk), high reliability and low power consumption. These switches utilize highly reflective micro-mirrors to manipulate an optical signal inside the switch directly without any conversions. They are used to build dynamically reconfigurable, highly-scalable physical optical network layer. As indicated by the simulation results of this paper, many of existing micro-mirror designs do not have their dynamic characteristics well optimized and this limits the switching speed of the optical switch. In a 3D MEMS switch, the coupling between the mechanical structure (micro-mirror) and electrostatic field (electrodes) results in dynamic coupled rotation of the micro-mirror about its axes, known as the cross-axis coupling effect. The coupling nature of micro-mirror rotation makes its control difficult. In this paper, we present the simulation case studies and a simple optimization technique leading to decoupled rotation of the micro-mirror about two perpendicular axes. This helps to reduce the switching time of the switch while keeping the same manufacturing process and only minimal design changes.

show abstract

“…It has the ability to steer incident beam over a wide range of deflection angles with great flexibility and agility. Several research groups have effectively demonstrated scanning micromirror arrays using various actuation mechanisms, including electrostatic [2,3,4], piezoelectric [ 5 ], magnetic [6] and thermal [7]. Electrostatic actuation was selected for the use here due to its fast switching time, small size, low power consumption, low production cost, simple electronics, simple fabrication and integration.…”

Section: Introductionmentioning

confidence: 99%

One-axis metallic electrostatic micromirror array

2008

View full text Add to dashboard Cite

A new micromachined one dimensional (1-D) micromirror array structure is presented that utilizes primarily electroplated nickel, a mechanically durable material with a high glass transition temperature and with controllable residual stress as the main structural material. The goal of this research is to develop custom micromirror array for use in epitaxial growth systems to define the device structure and hence eliminate the need for etching and lithography, the same micromirror can be used for switches and optical cross-connects. The high glass transition temperature of nickel allows it to be used at high temperature without causing any contamination to the epitaxial systems or to the deposited materials. Micromirror arrays with 5×5 and 1×5 pixels were designed with square shape with an area of 500 µm 2 to provide high fill factor and uniform stress distribution. The focus of this paper is on improved design for reducing actuation voltage and increasing the rotation angle. The micromirror was previously fabricated using surface micromachining technologies with a thick photoresist sacrificial layer [1]. The torsion beams were designed with a serpentine shape in order to optimize the voltage necessary to tilt the micromirror by ± 10º. The micromirrors were simulated using Coventor finite element tool in order to determine their geometries and performance. A voltage of 20 volts was required to rotate the mirror with a pixel pitch of 500 µm by 7.68º with resonance frequency of 221.52 Hz.

show abstract

Single-crystal silicon micromirror array with polysilicon flexures

Cited by 21 publications

References 4 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

MEMS optical switch: Switching time reduction

One-axis metallic electrostatic micromirror array

Contact Info

Product

Resources

About