Single-crystalline-like indium tin oxide thin films prepared by plasma enhanced atomic layer deposition

Hsu, Chia-Hsun; Zhang, Zhi-Xuan; Shi, Chun-Yan; Huang, Pao-Hsun; Wu, Wan-Yu; Gao, Peng; Huang, Chien Hao; Lien, Shui−Yang; Zhu, Wen‐Zhang

doi:10.1039/d2tc01834a

Cited by 9 publications

(3 citation statements)

References 60 publications

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“…The XPS confirmed that the indium and tin atoms bonded to oxygen and presence of oxygen vacancies in thin films. Hsu et al 99 prepared ITO thin films on a glass substrate using plasma‐enhanced atomic layer deposition (PEALD). XPS results confirmed the successful incorporation of Sn into In 2 O 3 .…”

Section: Ito Thin Film Properties and Preparation Dependenciesmentioning

confidence: 99%

Indium tin oxide thin film preparation and property relationship for humidity sensing: A review

Rajendran,

Prathuru,

Fernandez

et al. 2024

Engineering Reports

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This review aims to present a critical overview of indium tin oxide (ITO) thin film preparation methods, structure–property relationship, and its humidity sensing. A range of passive and active humidity sensors with thin films (based on metal oxides) detects humidity. ITO thin film has advantageous properties, such as low resistivity and high stability, making it highly suitable for humidity sensing applications. ITO thin film has shown the efficient level of humidity sensing, and a compatible size of humidity sensor can monitor the interface conditions humidity. So far, the application of ITO thin film for humidity measurement has yet to be explored at commercial scale, specifically in the detection of lower environmental humidity range (below 5% relative humidity (RH)). The research reveals a gap in improving the ITO thin film properties with an optimal range of preparation conditions. The research opportunities in the preparation, properties, characteristics, and efficient humidity sensitivity of ITO thin film are reviewed in this work.

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Section: Ito Thin Film Properties and Preparation Dependenciesmentioning

confidence: 99%

Indium tin oxide thin film preparation and property relationship for humidity sensing: A review

Rajendran,

Prathuru,

Fernandez

et al. 2024

Engineering Reports

View full text Add to dashboard Cite

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“…Based on their favorable electrical (o10 À4 O cm), optical (490%), and chemical stability properties, indium tin oxide (ITO) thin films have been used as transparent electrodes for electronic devices. [1][2][3][4][5] However, the relatively high sheet resistance and brittleness of ITO thin films are critical drawbacks for their application in advanced flexible electronics. [6][7][8] Recently, oxide/metal/oxide thin films have been extensively studied as alternative transparent electrodes owing to their outstanding performance, such as low sheet resistance, enhanced flexibility, and roll-to-roll process compatibility.…”

Section: Introductionmentioning

confidence: 99%

Elucidating the effect of Ag interlayer formation on the intrinsic mechanical properties of free-standing ITO/Ag/ITO thin films

Lee

Choi

et al. 2023

J. Mater. Chem. C

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“…As a scattered and rare element, indium (In(III)) is extremely rare on earth and often occurs in association with other metal ores. [1] In(III) and its compounds exhibited strong light permeability and electrical conductivity for the fabrication of indium tin oxide (ITO) coating, [2] semiconductors. [3] and infrared photodetectors.…”

Section: Introductionmentioning

confidence: 99%

Preparation of a Novel Sorbent Based on Pickering Emulsions Polymerization Method for Encapsulating Extractants and the Adsorption of Indium in an Aqueous Solution

Chen

Gao

Zhao

et al. 2023

Macro Chemistry & Physics

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The recovery of indium from impregnating resins in water is usually limited by the poor bonding of the extractant to the carrier resin. Pickering emulsion hydrogels (PEHGs) encapsulating extractant bis(2-ethylhexyl) phosphate are prepared by oil-in-water Pickering emulsions polymerization method using polyvinyl alcohol and sodium alginate as continuous phases and nano-SiO 2 and alkylphenol ethoxylates-10 (OP-10) as emulsifiers. PEHGs are used to recover trivalent In(III) from water to study its encapsulation and adsorption properties. Pickering emulsions are characterized by optical microscopy. PEHGs are characterized by Fourier transform infrared spectrometer and scanning electron microscopy. The results showed that the stabilization time of Pickering emulsions improved from 3 min to ≈14 days after the addition of 5 wt.% of OP-10. The internal structure of 4-Pickering emulsion hydrogels (4-PEHGs) prepared from Pickering emulsions co-stabilized by nano-SiO 2 and OP-10 is changed from core-shell to honeycomb structure and no oil phase leakage occurred. In(III) adsorption is carried out on 4-PEHGs. The results showed that the maximum adsorption of In(III) in water by 4-PEHGs is 18.03 mg g −1 . The adsorption process of In(III) is controlled by chemisorption. This study showed that 4-PEHGs can be used as an effective adsorbent for the recovery of indium in water.

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Single-crystalline-like indium tin oxide thin films prepared by plasma enhanced atomic layer deposition

Abstract: In this study, indium tin oxide (ITO) thin films are prepared by plasma enhanced atomic layer deposition (PEALD) using alternating exposures to cyclopentadienyl indium and oxygen plasma for indium oxide...

Cited by 9 publications

References 60 publications

Indium tin oxide thin film preparation and property relationship for humidity sensing: A review

Indium tin oxide thin film preparation and property relationship for humidity sensing: A review

Elucidating the effect of Ag interlayer formation on the intrinsic mechanical properties of free-standing ITO/Ag/ITO thin films

Preparation of a Novel Sorbent Based on Pickering Emulsions Polymerization Method for Encapsulating Extractants and the Adsorption of Indium in an Aqueous Solution

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