Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability

Lee, D.; Krishnamoorthy, Uma; Yu, Kun-Ming; Solgaard, Olav

doi:10.1016/j.sna.2003.11.024

Cited by 38 publications

(25 citation statements)

References 12 publications

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“…Because of these electrical isolation trenches, only one device layer is required for two-dimensional lateral motion. Previous works using electrostatic actuators for two degrees of freedom, such as [21,22], use two device layers for mechanical/electrical isolation.…”

Section: Device Fabricationmentioning

confidence: 99%

Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Chou

Horsley

et al. 2009

Appl. Phys. A

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We present a free-space optical interconnect system capable of dynamic closed-loop optical alignment using a microlens scanner with a proportional integral and derivative controller. Electrostatic microlens scanners based on combdrive actuators are designed and characterized with vertical cavity surface emitting lasers (VCSELs) for adaptive optical beam tracking in the midst of mechanical vibration noise. The microlens scanners are fabricated on siliconon-insulator wafers with a bulk micromachining process using deep reactive ion etching. We demonstrate dynamic optical beam positioning with a 700 Hz bandwidth and a maximum noise reduction of approximately 40 dB. Eye diagrams with a 1 Gb/s modulation rate are presented to demonstrate the improved optical link in the presence of mechanical noise.PACS

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Section: Device Fabricationmentioning

confidence: 99%

Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Chou

Horsley

et al. 2009

Appl. Phys. A

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“…It has been shown that large forces can be produced with this type of actuator, which allows a large vertical displacement to be realized with a low voltage applied [10]. This type of actuator has also been used to fabricate many different types of scanning micromirrors [11][12][13][14][15][16][17][18][19]. Table 1.…”

Section: Operating Frequency Surface Qualitymentioning

confidence: 99%

Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications

Carr

Olivier

Solgaard

2006

MEMS/MOEMS Components and Their Applications III

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A high-stroke micro-actuator array was designed, modeled, fabricated and tested. Each pixel in the 4x4 array consists of a self-aligned vertical comb drive actuator. This micro-actuator array was designed to become the foundation of a micro-mirror array that will be used as a deformable mirror for adaptive optics applications. Analytical models combined with CoventorWare® simulations were used to design actuators that would move up to 10µm in piston motion with 100V applied. Devices were fabricated according to this design and testing of these devices demonstrated an actuator displacement of 1.4µm with 200V applied. Further investigation revealed that fabrication process inaccuracy led to significantly stiffer mechanical springs in the fabricated devices. The increased stiffness of the springs was shown to account for the reduced displacement of the actuators relative to the design.

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“…Shape memory alloy (nitinol) based actuators are used in first generation confocal endomicroscopes to provide an axial displacement of ~250 µm [15]. Other MEMS-based electrostatic scanners have been developed with fast response times at low voltages but have not achieved adequate Z-axis motion [16]. Electrothermal devices can provide large axial displacements (>600 µm) at low voltages (∼5 V) but the response time is too slow for in vivo imaging [17].…”

Section: Introductionmentioning

confidence: 99%

Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging

Li¹,

Duan²,

Qiu³

et al. 2016

Opt. Express

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Abstract:We present an integrated monolithic, electrostatic 3D MEMS scanner with a compact chip size of 3.2 × 2.9 mm 2 . Use of parametric excitation near resonance frequencies produced large optical deflection angles up to ± 27° and ± 28.5° in the X-and Y-axes and displacements up to 510 μm in the Z-axis with low drive voltages at atmospheric pressure. When packaged in a dual axes confocal endomicroscope, horizontal and vertical cross-sectional images can be collected seamlessly in tissue with a large field-of-view of >1 × 1 mm 2 and 1 × 0.41 mm 2 , respectively, at 5 frames/sec.

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Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability

Cited by 38 publications

References 12 publications

Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications

Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging

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