Single Photon Counting Spatial Uniformity of 4H-SiC APD Characterized by SNOM-Based Mapping System

Cai, Xingju; Cai, Wu; Chen, Yunfeng; Zhou, Dong; Liu, Fei; Yang, Sen; Chen, Dunjun; Ren, Fangfang; Zhang, Rong; Zheng, Yi

doi:10.1109/lpt.2017.2735625

Cited by 12 publications

(8 citation statements)

References 10 publications

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“…With increasing bias and the onset of gain, the response becomes limited to one side of the mesa, with the optically dead zone expanding further along the right-side of the scan and clear hotspots developing at the top and left edges of the left side with increasing gain from 10 3 to 10 6 , consistent with the results of Guo et al [15]. However, an increase in the spatial uniformity is observed at the highest bias examined, a gain of ≈ 10 7 , which is similar to the results of Cai et al [14]. Studies of spatial uniformity in the same device operating in Geiger mode are shown in Figure 3.…”

Section: Spatial Uniformity Resultssupporting

confidence: 89%

“…A challenge recently identified for these devices is the spatial non-uniformity of these detectors operating in Geigermode. Specifically, Cai et al observed that the Geiger-mode spatial non-uniformity of SiC APDs in which light entered through the p-doped side of the diode was highly dependent upon applied excess bias [14]. At low bias, these devices had large optically dead zones, where the photo-counts were not discernable from dark counts, while two hot-spots located on one side of the mesa were responsible for the detector's photo-response.…”

Section: Introductionmentioning

confidence: 99%

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Studies of spatial uniformity and jitter in SiC UV SPADs

Sampath

Garrett

Schuster³

et al. 2023

Advanced Photon Counting Techniques XVII

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Ultraviolet single-photon avalanche detectors (UV-SPADs) that are low cost, size, weight, and power as well as resilient to shock, high temperatures and stray magnetic fields have a number of applications. SiC is attractive for UV SPADs as it is inherently blind to visible light, and Geiger mode as well as high-gain linear-mode devices have been demonstrated. However, issues remain regarding bias dependence of spatial uniformity of detection efficiency (DE) and responsivity as well as the temporal resolution, or jitter, in Geiger mode. Over a wide range of device structures (p- vs. n- illuminated) we observe a non-uniform responsivity across the active area for values of gain from 100 to 105, and we observe that the nonuniformity is somewhat reduced at higher gain. The spatial dependence of the DE in Geiger mode agrees with linear-mode results for gain >105. This presents in all devices as an “optically dead” region on one side of the detector whose extent varies with operating conditions and is independent of contact geometry and device layout. The temporal resolution of single-photon detection is characterized with a femtosecond-pulsed source at 267 nm and found to have a full-width-at-half-maximum jitter < 92 ps, which is significantly lower than previously reported results and likely an upper bound due to the quenching circuit and the spatial non-uniformity. Numerical modeling suggests that small variations in doping densities and thicknesses of epitaxial layers might be a cause of the non-uniformity. Results also indicate that detector layer design, size, and geometry can mitigate the effects of spatial non-uniformity,

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Section: Spatial Uniformity Resultssupporting

confidence: 89%

Section: Introductionmentioning

confidence: 99%

Studies of spatial uniformity and jitter in SiC UV SPADs

Sampath

Garrett

Schuster³

et al. 2023

Advanced Photon Counting Techniques XVII

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“…With double-gate method 17 , further experimental result on P ap distribution shows that once an avalanche occurs the subsequent P ap is roughly 100% and after several hundred nanoseconds P ap decreases down to 0 18 , which implies that a) hailu@nju.edu.cn b) zhangjun@ustc.edu.cn the lifetime of trapped carrier could be quite short. On the other hand, the distribution of avalanche gain across the active area of 4H-SiC SPAD exists severe nonuniformity, which results in large variations of avalanche amplitudes 16,19 and thus the nonuniformity of photon detection efficiency (PDE) 20 .…”

Section: Introductionmentioning

confidence: 99%

Free-running 4H-SiC single-photon detector with ultralow afterpulse probability at 266 nm

Yu¹,

Li²,

Zhao³

et al. 2023

Preprint

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Ultraviolet single-photon detector (UVSPD) provides a key tool for the applications requiring ultraweak light detection in the wavelength band. Here, we report a 4H-SiC single-photon avalanche diode (SPAD) based free-running UVSPD with ultralow afterpulse probability. We design and fabricate the 4H-SiC SPAD with a beveled mesa structure, which exhibits the characteristic of ultralow dark current. We further develop a readout circuit of passive quenching and active reset with tunable hold-off time setting to considerably suppress the afterpulsing effect. The nonuniformity of photon detection efficiency (PDE) across the SPAD active area with a diameter of ∼ 180 µm is investigated for performance optimization. The compact UVSPD is then characterized, exhibiting a typical performance of 10.3% PDE, 133 kcps dark count rate and 0.3% afterpulse probability at 266 nm. Such performance indicates that the compact UVSPD could be used for practical ultraviolet photon-counting applications.

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“…Owing to the advantages such as internal photoelectric gain, small size, low driving voltages, high efficiency, and fast response, focal-plane APD arrays bring about new three-dimensional (3D) imaging techniques which provide much wealthier and more accurate information for object recognition and identification [9]. Advanced 3D imaging technologies are strongly required in radar systems including laser detection and ranging (LADAR), so the focal-plane APDs and their LADAR applications were widely and deeply studied in recent years [10][11][12][13][14][15][16][17][18][19][20]. For the purpose of more progress in the future, it is necessary to take an overview on the present research and production of APD arrays.…”

Section: Introductionmentioning

confidence: 99%

“…Princeton Lightwave also succeeded in producing focal-plane single photon avalanche detector (SPAD) arrays and commercializing their single-photon camera based on the SPADs [11]. The research and production of other groups [12][13][14] may also be valuable as references for future developments. In this chapter, we review the research and application of the focalplane APDs in Southwest Institute of Technical Physics and University of Electronic Science and Technology of China [15][16][17][18][19][20].…”

Section: Introductionmentioning

confidence: 99%

Avalanche Photodiode Focal Plane Arrays and Their Application to Laser Detection and Ranging

Song¹

2018

Photodetectors [Working Title]

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Focal-plane avalanche photodiodes (APDs) are being more and more widely and deeply studied to satisfy the requirement in weak light and single photon imaging. The progresses of this worldwide study, especially the distinctive researches and achievements in Southwest Institute of Technical Physics and University of Electronic Science and Technology of China are reviewed in this chapter. We successfully fabricated up to 64 × 1 linear-mode Si APD arrays, and 32 × 32-64 × 64 Si single-photon avalanche detector (SPAD) arrays, and applied them in Laser Detection and Ranging (LADAR) platforms like driverless vehicles. Also, we developed 32 × 32-64 × 64 InGaAsP/InP SPAD arrays, and constructed three-dimensional imaging LADAR using them. Together with the progresses of other groups and other materials, we see a prospective future for the development and application of focal-plane APDs.

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Single Photon Counting Spatial Uniformity of 4H-SiC APD Characterized by SNOM-Based Mapping System

Cited by 12 publications

References 10 publications

Studies of spatial uniformity and jitter in SiC UV SPADs

Studies of spatial uniformity and jitter in SiC UV SPADs

Free-running 4H-SiC single-photon detector with ultralow afterpulse probability at 266 nm

Avalanche Photodiode Focal Plane Arrays and Their Application to Laser Detection and Ranging

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