Single step rapid thermal diffusion for selective emitter formation and selective oxidation

Schindler, R.; Breymesser, A.; Lautenschlager, H.; Marckmann, Carl Johan; Noël, S.; Schubert, U.

doi:10.1109/pvsc.1996.564055

Cited by 4 publications

(1 citation statement)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This one-step diffusion (sometimes known as one-step) is a commonly used technique. In the past, several authors proposed different uses for one-step diffusion, such as one-step screen-printing [12], one-step rapid thermal diffusion [13], and single high temperature step [14].…”

Section: Introductionmentioning

confidence: 99%

Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion

Wang

Liou

et al. 2015

International Journal of Photoenergy

View full text Add to dashboard Cite

In order to simplify process procedure and improve conversion efficiency (η), we present new steps of laser opening and one-step POCl3diffusion to fabricate selective emitter (SE) solar cells, in which heavily doped regions (HDR) and lightly doped regions (LDR) were formed simultaneously. For HDR, we divided six cells into two groups for POCl3diffusion with sheet resistance (RS) of 40 Ω/sq (for group A) and 50 Ω/sq (for group B). The dry oxidation duration at a temperature of 850°C was 18, 25, and 35 min for the 3 different cells in each group. This created six SE samples with differentRSpairings for the HDR and LDR. The optimal cell (sample SE2) withRSvalues of 40/81 Ω/Sq in HDR/LDR showed the bestηof 16.20%, open circuit voltage (VOC) of 612.52 mV, and fill factor (FF) of 75.83%. The improvement ratios are 1.57% forηand 14.32% for external quantum efficiency (EQE) as compared with those of the two-step diffusion process of our previous study. Moreover, the one-step laser opening process and omitting the step of removing the damage caused by laser ablation especially reduce chemistry pollution, thus showing ecofriendly process for use in industrial-scale production.

show abstract

Section: Introductionmentioning

confidence: 99%