“…By miniaturizing the sensor element, new application fields are gathered. The new sensor elements are much smaller in size and are competitive 2,4,5, [11][12][13]21,[28][29][30][31][32][33][36][37][38]42,45 with or even improved 1,3, 15,17,[23][24][25]43 in sensitivity compared to conventional Pirani gauges. Many designs [6][7][8][9][10][14][15][16][17][18][19][20]22,26,34 have been developed for specific pressure ranges.…”