In this work, ZnO and ZrO 2 ridges with 2 lm size are created based on a centrifugeaided micromolding approach and then sintered with different time. Characterization of feature morphology, fidelity, grain size, relative density, and linear shrinkage has been conducted. The densification mechanisms for both ZnO and ZrO 2 are controlled by grain-boundary diffusion, but their grain growth mechanisms are dominated by gas diffusion and surface diffusion respectively. The sintering behavior for the bulk can be described with a N g /N b factor at 36, while for the features, a smaller N g /N b factor (15 for ZnO and 8 for ZrO 2 ) is needed. Attributed to their sintering mechanism difference, the grains in the ZnO features have a faster growth rate than those in the bulk, while the grains in the ZrO 2 features have a similar growth rate to those in the bulk. ZnO has a much faster grain growth behavior, leading to ridge fidelity loss and severe ridge destruction, while ZrO 2 has a much slower grain growth rate, resulting in high ridge fidelity and strong resistance to ridge destruction.
K E Y W O R D Sdestruction, micrometer-sized, ridge feature, sintering mechanism, ZnO, ZrO 2