Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology

Thier, Markus; Saathof, Rudolf; Sinn, Andreas; Hainisch, Reinhard; Schitter, Georg

doi:10.1016/j.ifacol.2016.10.534

Cited by 16 publications

(3 citation statements)

References 3 publications

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“…To ensure structural stability, VCMs were strategically arranged in parallel with flexible guide plates positioned between the stators and movers, as illustrated in Figure 2 . As the system linearly approximates the working position, motion decoupling can be achieved by controlling the resultant force of the VCMs [ 20 ]. Based on this concept, we established a lumped-mass model, capturing the low-frequency dynamics of each DOF, as illustrated in (1) and (2).…”

Section: Methodsmentioning

confidence: 99%

High-Precision Positioning Stage Control Based on a Modified Disturbance Observer

Wang,

Li,

Zhou

et al. 2024

Sensors

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High-precision positioning systems play a crucial role in various industrial applications. This study focuses on improving the performance of a high-precision multi-degrees-of-freedom (DOF) stage. In terms of the controller design, the following two key challenges must be addressed: the cross-decoupling of different DOFs and the impact of external disturbances. To address these problems, a self-tuning approach is proposed for simultaneous decoupling and disturbance suppression. Initially, the stage undergoes static decoupling using a data-based approach, facilitating feedback control for each DOF through single-input, single-output controllers. Addressing dynamic coupling and external disturbance challenges, we introduced a comprehensive evaluation index and a self-tuning multi-input, multi-output disturbance observer. This approach enabled the evaluation and optimization of the disturbance compensation for all DOFs, ensuring optimal positioning accuracy. Finally, we tested the proposed method using a high-precision multi-DOF stage with a real-time control platform. The results demonstrated a significant reduction in the standard deviations of positioning errors in the rx, ry, and z directions by 46%, 58%, and 6%, respectively. The approach used in this study opens avenues for advancements in the design and control of complex multi-DOF systems.

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Section: Methodsmentioning

confidence: 99%

High-Precision Positioning Stage Control Based on a Modified Disturbance Observer

Wang,

Li,

Zhou

et al. 2024

Sensors

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“…This problem seems to be even more significant when in situ measurement is provided [52,53]. Some solutions can be proposed with the isolation [54][55][56] or suppression [57] of vibration sources. However, it is difficult to provide a general procedure for the selection of the method for the S-surface definition.…”

Section: Introductionmentioning

confidence: 99%

Roughness Evaluation of Burnished Topography with a Precise Definition of the S-L Surface

Podulka

2022

Applied Sciences

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Studies of surface topography including processes of measurement and data analysis have an influence on the description of machined parts with their tribological performance. Usually, surface roughness is analysed when a scale-limited (S-L) surface, excluding short (S-) and length (L-) components from the raw measured data, is defined. Errors in the precise definition of the S-L surface can cause the false estimation of detail properties, especially its tribological performance. Errors can arise when the surface contains some burnished details such as oil pockets, dimples, scratches, or, generally, deep or wide features. The validation of proposed methods for S-L surface definition can also affect the accuracy of the ISO 25178 surface topography parameter calculation. It was found that the application of commonly used procedures, available in commercial software (e.g., least-square fitted cylinder element or polynomial planes, regular or robust Gaussian regression, spline, median or fast Fourier transform filters) can be suitable for precise S-L surface definition. However, some additional analyses, based on power spectral densities, autocorrelation function, texture direction graphs, or spectral characterisation, are strongly required. The effect of the definition of the S-L surface on the values of the ISO 25178 parameters was also comprehensively studied. Some proposals of guidance on how to define an appropriate S-L surface with, respectively, an objective evaluation of surface roughness parameters, were also presented.

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“…The considered motion systems are characterized by positioning stages with little damping and friction (e.g., due to the usage of air or magnetic bearings) and thus, the noise current easily translates to undesired forces or torques of the actuators [13]- [15]. Noise components of the output currents are of special disadvantage in mechatronic positioning applications that rely on slowly varying or static currents, e.g., in magnetic levitation bearings or vibration isolation systems [16], [17].…”

Section: Introductionmentioning

confidence: 99%