“…These vapor bubbles can be generated in a controlled manner at a designated location with an adjustable shape, size, and duration. [1][2][3][4] The controlled vapor bubbles have great potential to be used as micro-actuators, which have no mechanical moving parts, thus allow for simple actuator structure design and easy fabrication process. The vapor bubble-based micro-actuators have been widely utilized as microvalves, 5,6 micropumps, 7-9 micromixers, 10,11 bio-particle manipulators, 12 and droplet generators.…”