2011
DOI: 10.1063/1.3561439
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Size dependent optical properties of Si quantum dots in Si-rich nitride/Si3N4 superlattice synthesized by magnetron sputtering

Abstract: A spectroscopic ellipsometry compatible approach is reported for the optical study of Si quantum dots (QDs) in Si-rich nitride/silicon nitride (SRN/Si3N4) superlattice, which based on Tauc-Lorentz model and Bruggeman effective medium approximation. It is shown that the optical constants and dielectric functions of Si QDs are strongly size dependent. The suppressed imaginary dielectric function of Si QDs exhibits a single broad peak analogous to amorphous Si, which centered between the transition energies E1 an… Show more

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Cited by 28 publications
(19 citation statements)
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“…27 However, several other groups reported PL peaks of nitride-embedded NCs in the range of 600-830 nm, i.e., in the same range as oxide-embedded Si NCs. 12,20,24,28 On the other hand, also PL peaks of down to 450 nm were reported. 5,29 Thus, obviously there seems to be no universally accepted PL peak position for nitride embedded Si NCs.…”
Section: Photoluminescence Of Si Ncs In Si 3 Nmentioning
confidence: 97%
See 1 more Smart Citation
“…27 However, several other groups reported PL peaks of nitride-embedded NCs in the range of 600-830 nm, i.e., in the same range as oxide-embedded Si NCs. 12,20,24,28 On the other hand, also PL peaks of down to 450 nm were reported. 5,29 Thus, obviously there seems to be no universally accepted PL peak position for nitride embedded Si NCs.…”
Section: Photoluminescence Of Si Ncs In Si 3 Nmentioning
confidence: 97%
“…9 Despite these expected advantages of silicon nitride films for the electrical transport, the dominating absorption centers as well as the origin of the luminescence from Si NC/Si 3 N 4 samples are still under debate. The origin of photoluminescence of silicon nitride films containing Si NCs was attributed by several groups 5,[10][11][12] to quantum confinement effects where the PL peak shifts to higher energies with decreasing Si NCs size. However, the results are not unambiguous, and a clear and strong PL peak shift with ranging size was not observed so far.…”
Section: Introductionmentioning
confidence: 99%
“…According to the results reported in other literatures, the peaks of P1, P2, and P3 can be attributed to different defect-related radiations [4]. But for P4 and P5, the peak wavelengths can be tuned by annealing temperatures, quantum confinement effects could be suggested as their origin [5]. In the as-deposited Si-rich α-Si 1-x -C x : H samples, there are plenty of SiH n (n=0,1,2,3), and Si 1-x C x :H radicals [6].…”
Section: Methodsmentioning
confidence: 72%
“…In a super-lattice structure (quantum dots arrays) the wave function can be diffuses into neighboring QDs. They couple with each other to broaden the discrete quantum levels to form finite-width mini-bands [14][15][16]. Mini-bands formation is a key parameter in QD solar cell.…”
Section: Introductionmentioning
confidence: 99%