Size optimization of metamaterial structure for elastic layer of a piezoelectric vibration energy harvester

Ichige, Ryo; Kuriyama, Nobuaki; Umino, Yohei; Tsukamoto, Takuya; Suzuki, Takao

doi:10.1016/j.sna.2020.112488

Cited by 27 publications

(15 citation statements)

References 29 publications

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“…In the context of acoustic sensors employing an organic film to cover the gaps between cantilevers, the Young's modulus and thickness of the film are critical factors, as they influence the resonance frequency and sensitivity of the sensor. This study utilizes COMSOL Multiphysics 6.0 to simulate the effects of the organic film's Young's modulus and thickness on the resonance frequency, [23][24][25][26][27][28][29][30] as illustrated in Fig. 1.…”

Section: Design Conceptmentioning

confidence: 99%

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Kuchiji,

Masumoto,

Morishita

et al. 2024

Jpn. J. Appl. Phys.

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A wideband acoustic sensor is reported, comprising a piezoelectric micro electro mechanical systems (MEMS) acoustic transducer with organic film-coated cantilevers. Considering the sensitivity reduction associated with the application of an organic film, it is necessary to optimize the material selection and thickness of the organic film. Therefore, the relationship between the thickness of the polyurethane film and the consequent loss in sensitivity is elucidated. Our findings demonstrate that the polyurethane film thickness should be approximately 0.5 μm (or less) to limit sensitivity loss to 6 dB. Additionally, both simulations and experimental results reveal that the resonant frequency of the system is significantly influenced by the warpage of the cantilever. This study provides essential insights into optimizing the performance of MEMS acoustic transducers with organic film-coated cantilevers.

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Section: Design Conceptmentioning

confidence: 99%

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Kuchiji,

Masumoto,

Morishita

et al. 2024

Jpn. J. Appl. Phys.

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“…Next, to confirm the influence of the resonance frequency by connecting the cantilevers to the elastic film, a simulation of the resonance frequency with the structure shown in Fig. 3 was performed using COMSOL Multiphysics 6.0; [21][22][23][24][25][26][27][28] the material constants used were from the COMSOL built-in material library. The edge of the cantilever was fixed as the boundary condition.…”

Section: Device Designmentioning

confidence: 99%

Piezoelectric MEMS wideband acoustic sensor coated by organic film

Kuchiji¹,

Masumoto²,

Baba³

2023

Jpn. J. Appl. Phys.

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In this study, we developed an acoustic sensor with a structure in which a piezoelectric cantilever array is covered with an organic film. For this, we used AlN and polyurethane as the piezoelectric material and organic film, respectively. The results suggested that the sensitivity in the low-frequency region improved, and the resonance frequency increased. We investigated the resonance frequency based on a simulation and verified that it matched the measured value. Further, we created a broadband acoustic sensor by covering the space between the cantilevers with an organic film.

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“…[24,[26][27][28] Auxetic strucutre is applied in rigid piezoelectric energy harvesters for enhancing the energy harvesting output via increasing the strain on piezoelectric materials or reducing the frequency range. [29][30][31][32][33][34][35][36][37][38][39] Apart from rigid energy harvesters, auxetic structures also have many applications in the soft electronics field. For example, Jiang et al developed a carbon nanotube-based piezoresistive sensor with an auxetic structure attached to the sensor film.…”

Section: Introductionmentioning

confidence: 99%

3D Printed Auxetic Structure‐Assisted Piezoelectric Energy Harvesting and Sensing

Zhou

Parida

Chen

et al. 2023

Advanced Energy Materials

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The fast development of wearable electronic systems requires a sustainable energy source that can harvest energy from the ambient environment and does not require frequent charging. Piezoelectric polymer films are a perfect candidate for fabricating piezoelectric nanogenerators (PENGs) to harvest mechanical energy from the environment due to their flexibility, good piezoelectricity, and environmental‐independent stable performance because of their inherent polarization. However, most of their applications are limited to the pressing mode energy harvesting that is based on the 3‐3‐direction piezoelectric effect due to the molecular polarization and nonstretchability. In this work, by 3D printing an auxetic structure on a polymer film‐based PENG, the bending deformation of the PENG can be transformed into the well‐controlled in‐plane stretching deformation, enabling the 3‐1‐direction piezoelectric effect. The synclastic effect of the auxetic structure is applied in flexible energy harvesting device for the first time, which makes the previously untapped bending deformation on a film a valuable device for energy harvesting and increases the bending output voltage of the PENG by 8.3 times. The auxetic structure‐assisted PENG is also demonstrated as a sensor to sense the bending angle and monitor the motion by mounting on different joints of the human body and soft robotic finger.

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Size optimization of metamaterial structure for elastic layer of a piezoelectric vibration energy harvester

Cited by 27 publications

References 29 publications

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Piezoelectric MEMS wideband acoustic sensor coated by organic film

3D Printed Auxetic Structure‐Assisted Piezoelectric Energy Harvesting and Sensing

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