Skirting effects in the variable pressure scanning electron microscope: Limitations and improvements

Zoukel, Abdelhalim; Khouchaf, L.; Martino, Jean Di; Ruch, David

doi:10.1016/j.micron.2012.05.004

Cited by 15 publications

(8 citation statements)

References 27 publications

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“…where R s is the skirt radius, Z the gas atomic number, E the incident beam energy, P the pressure, T the temperature and L corresponds to the gas path length (GPL). Currently the radius of the skirt is used to describe the consequences of the electron beam scattering by the gas on the resolution in imaging and microanalysis [5][6][7][8][9][10][11][12][13][14]. The Equation 3of R s given above is one of the most used expressions to follow this phenomenon.…”

Section: Resultsmentioning

confidence: 99%

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The Surface Skirt in Gaseous Scanning Electron Microscope (GSEM)

Khouchaf

2013

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In this work, a novel parameter called the surface skirt (S s) is introduced. The electron beam scattering by gaseous environment is the fundamental parameter limiting the performance of the Gaseous Scanning Electron Microscopy (GSEM). The result is the enlargement of the primary beam characterized by the radius skirt R s. The scattering phenomena require a much closer re-examination. In fact, depending on the localization of EDX detector and the particles shape to analyze, the collected signal after the beam skirt will be different and R s also will be different. So, except for homogeneous materials, R s can not describe the scattering behavior. In this study, the surface skirt S s instead of the radius skirt is introduced. Unlike R s , the results show that S s is a linear function versus pressure. This may help to use S s in different scattering regimes and for a best interpretation of the consequences of electron scattering beam by gaseous environment. For demonstration, two gas environments: helium and water vapor are given but the results are valid whatever the environment used.

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Section: Resultsmentioning

confidence: 99%

“…So, except for homogeneous materials, R s cannot explain or describe alone what happen. Several works have been performed but the scattering phenomena require a substantial revision [5][6][7][8][9][10][11][12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

The Surface Skirt in Gaseous Scanning Electron Microscope (GSEM)

Khouchaf

2013

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“…The images were S51 obtained using the experimental conditions of 5 kV and 50 Pa in order to assess the consequences of the gas pressure in the ESEM. 30…”

Section: Characterizationmentioning

confidence: 99%

Poly(methyl methacrylate)/SiO₂ nanocomposites: Effects of the molecular interaction strength on thermal properties

Boulerba

Zoukel

2021

Polymers and Polymer Composites

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Poly(methyl methacrylate)/silica nanocomposites membranes were prepared by simple solution mixing method using three different solvents (acetone, acetonitrile and chloroform). The structure and thermal properties of these nanocomposites were investigated by fourier transform infrared spectroscopy (FTIR), differential scanning calorimetry (DSC), thermogravimetric analysis (TGA) and environmental scanning electron microscope (ESEM). The infrared spectra confirm that the strongest H-bond interaction between the PMMA and silica was found when using chloroform solvent. In the case of thermal properties, the DSC and TGA analyses show significant improvement in thermal stability and glass transition temperature (Tg). Furthermore, the ESEM micrographs prove the structure stability of these synthesized nanocomposites. The results demonstrate that the solvent that lead to form the strongest H-bond interaction between the PMMA carbonyl groups and silica silanol groups (as chloroform solvent) will be more efficient in the synthesis of PMMA/SiO2 nanocomposites.

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“…Based on our recent approach (Zoukel et al, 2013a(Zoukel et al, , 2013b, the X-ray resolution will be governed by the scattered electron beam if the size of the skirt is superior to the size of the interaction volume created by the unscattered electron beam. Otherwise, the X-ray spatial resolution is governed by the interaction volume.…”

Section: Impact Of the "Skirt" On The X-ray Microanalysis Lateral Resmentioning

confidence: 99%

“…The main conclusion was that the reduced efficiency of charge neutralization with helium is compensated for by the reduction of beam skirting. Recently, a new approach has been suggested to cope directly with problems contributed by the e-beam skirt (Zoukel et al, 2013a(Zoukel et al, , 2013b. This approach is based on finding the optimum experimental parameters for which the X-ray lateral resolution is governed only by the high-vacuum "pear-shaped" interaction volume (the electron beam skirt should fall within the interaction volume created by the primary e-beam).…”

Section: Introductionmentioning

confidence: 99%

Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM

Zoukel

Khouchaf

Martino³

et al. 2014

Microsc Microanal

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A procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account. Good agreement between the simulated and experimental EDS profiles shows the reliability of the proposed procedure. A significant improvement in measurement of the EDS profile interfacial distance (DINT) has been achieved.

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Skirting effects in the variable pressure scanning electron microscope: Limitations and improvements

Cited by 15 publications

References 27 publications

The Surface Skirt in Gaseous Scanning Electron Microscope (GSEM)

The Surface Skirt in Gaseous Scanning Electron Microscope (GSEM)

Poly(methyl methacrylate)/SiO₂ nanocomposites: Effects of the molecular interaction strength on thermal properties

Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM

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Skirting effects in the variable pressure scanning electron microscope: Limitations and improvements

Cited by 15 publications

References 27 publications

The Surface Skirt in Gaseous Scanning Electron Microscope (GSEM)

The Surface Skirt in Gaseous Scanning Electron Microscope (GSEM)

Poly(methyl methacrylate)/SiO2 nanocomposites: Effects of the molecular interaction strength on thermal properties

Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM

Contact Info

Product

Resources

About

Poly(methyl methacrylate)/SiO₂ nanocomposites: Effects of the molecular interaction strength on thermal properties