Sleeve-Type Ultra Miniature Optical Fiber Pressure Sensor Fabricated by DRIE

Shimada, M.; Kinefuchi, Yoshio; Takahashi, K.

doi:10.1109/jsen.2008.926970

Cited by 9 publications

(7 citation statements)

References 3 publications

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“…Initial demonstrations etched only the inner surface of the sleeve, relying on mechanical dicing to produce a cubic outer profile with dimensions 500 × 500 × 300 μm . Etching both the inner and outer surfaces produces a rounded sleeve that more closely matches the fiber profile . As an alternative to silicon, polymer sleeves have been defined photolithographically, using the negative photoresist Su8 .…”

Section: Through‐fiber Patterningmentioning

confidence: 99%

“…This is especially pronounced in low profile sensors, where the membrane diameter matches the fiber diameter. Lithographically implementing a mesa keeps the central reflecting surface flat, while allowing the surrounding diaphragm to deform . Shimada et al report an improvement in modulation ratio from 3% to 76% upon implementing a mesa on their nickel diaphragm, although a reduced surface roughness also contributed to this improvement …”

Section: Through‐fiber Patterningmentioning

confidence: 99%

“…MEMS techniques were reported for the wafer‐scale production of fiber tip sensors as early as 1996 . More recently, Esashi et al reported 3000 elements from a 2 × 2 cm 2 wafer, and 100,000 sensing elements from a 4′′ wafer .…”

Section: Potential For Mass Manufacturingmentioning

confidence: 99%

“…The fabrication techniques that have been applied to fiber tips include: Planar fabrication technologies , which have been applied intrinsically and extrinsically to the fiber tip, and include photolithography, nanoimprinting, interference lithography, electron‐beam lithography, focused ion‐beam milling, two‐photon polymerization, femtosecond laser ablation, and thin‐film deposition; Hybrid techniques , which transfer micro and nano structures to the fiber tip, thereby retaining the benefits of fabricating on large planar substrates; and Through‐fiber patterning , where the optical power distribution within the fiber can create unique geometries of photosensitive material at the fiber tip . Finally, this article reviews the techniques, challenges and prospects for mass production of patterned fiber tips, where the microscopic cross‐section and inherently serial nature of the optical fiber stand in stark contrast to the large size and parallel die processing of traditional planar substrates.…”

Section: Introductionmentioning

confidence: 99%

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The Optical Fiber Tip: An Inherently Light‐Coupled Microscopic Platform for Micro‐ and Nanotechnologies

2014

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The flat tip of an optical fiber is a unique and unconventional platform for micro and nanotechnologies. The small cross-section and large aspect ratio of the fiber provide an inherently light-coupled substrate that is uniquely suited to remote, in vivo and in situ applications. However, these same characteristics challenge established fabrication technologies, which are best suited to large planar substrates. This review presents a broad overview of strategies for patterning the flat tip of an optical fiber. Techniques discussed include self-assembly, numerous lithographies, through-fiber patterning, hybrid techniques, and strategies for mass manufacture, while the diverse applications are discussed in context throughout.

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Section: Through‐fiber Patterningmentioning

confidence: 99%

Section: Through‐fiber Patterningmentioning

confidence: 99%

Section: Potential For Mass Manufacturingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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The Optical Fiber Tip: An Inherently Light‐Coupled Microscopic Platform for Micro‐ and Nanotechnologies

2014

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“…The sensitivity of diaphragm-based sensors depends upon the diaphragm radius and thickness [19]. Different diaphragm materials have been proposed for acoustic measurement study such as graphene [19], polypropylene/poly (ethylene terephthalate) [20], nitrile rubber [21], PDMS [22], Parylene-C [23], aluminium foil [24], gold [25], and silver [26]. The SMS structure sensors using multimode interference phenomena are gaining attention in many applications.…”

Section: Introductionmentioning

confidence: 99%

Fiber Optic Acoustic Sensor Based on SMS Structure With Thin Polymer Diaphragm for Partial Discharge Detection

et al. 2020

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This paper proposes a fiber optic acoustic sensor (FOAS) based on a single-mode fibermultimode fiber-single-mode fiber (SMS) structure attached to a thin polymer film used as a diaphragm. The diaphragm was specially developed to enhance the sensitivity towards the acoustic pressure-wave resulted from the partial discharge (PD) events. The sensitivity and signal-to-noise ratio (SNR) characterizations of the FOAS without and with a thin polymer film were performed. Both time-resolved and phase-resolved partial discharge (PRPD) patterns measurements were carried out in air and oil media. The experiment was conducted with three-electrodes using FOAS in conjunction with the conventional PD measurement as per IEC 60270 standard. The sensor achieved a sensitivity up to-31.21 dBm and-30.8 (0 dBm is defined as 1V/µBar) using broadband and tunable light source, respectively. The discharge characteristics pattern of FOAS was verified with IEC 60270 standard, and the patterns of FOAS resembled IEC 60270 standard. The proposed FOAS was capable for detecting the PD using both broadband and tunable laser lights. The use of the thin polymer film had a significant impact on the acoustic sensitivity. With the simple, low-cost design structure and free from electromagnetic interference, FOAS is found to be suitable as an in-situ sensor for detecting the acoustic signals of partial discharge and can be utilized inside the transformer.

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Microengineered structures for rapid automatic loading of optical fibre segments

Combariza¹,

Shah²,

Sriram³

et al. 2011

J. Micromech. Microeng.

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We present a technique to rapidly and automatically produce sections of optical fibre and load them into arrays such that they can be nano-imprinted in parallel. The technique makes use of automated fibre feeding, cutting and alignment with microfabricated groove arrays. The system is analyzed and optimized and it is found that the geometry of the arrays themselves is a critical factor. Three types of array are investigated-simple grooves, grooves with lateral funnels at the input, and bulk silicon machined V-groove arrays with funnels in both lateral and vertical dimensions. It is found that the incorporation of funnels significantly increases the accuracy of loading, overcoming the need for precise alignment, such that a throughput nearing 1000 fibre segments an hour can be achieved. This system forms part of a sequence of novel processes for the production of nano-photonic sensors.

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Sleeve-Type Ultra Miniature Optical Fiber Pressure Sensor Fabricated by DRIE

Cited by 9 publications

References 3 publications

The Optical Fiber Tip: An Inherently Light‐Coupled Microscopic Platform for Micro‐ and Nanotechnologies

The Optical Fiber Tip: An Inherently Light‐Coupled Microscopic Platform for Micro‐ and Nanotechnologies

Fiber Optic Acoustic Sensor Based on SMS Structure With Thin Polymer Diaphragm for Partial Discharge Detection

Microengineered structures for rapid automatic loading of optical fibre segments

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