2003
DOI: 10.1078/0030-4026-00281
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Slightly dispersive white-light spectral interferometry to measure distances and displacements

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Cited by 12 publications
(5 citation statements)
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“…We obtained the thickness t = 53.18 im with a standard deviation of 0.14 1am. 15 Once the thickness t and the spectral phase 8(A) were obtained, the mirror position L in Eq. (11) can be determined precisely by a least-squares fitting of the theoretical spectral interferogram (14) to the recorded one.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…We obtained the thickness t = 53.18 im with a standard deviation of 0.14 1am. 15 Once the thickness t and the spectral phase 8(A) were obtained, the mirror position L in Eq. (11) can be determined precisely by a least-squares fitting of the theoretical spectral interferogram (14) to the recorded one.…”
Section: Resultsmentioning
confidence: 99%
“…1 Vj , we obtain LLmax (2V2 ln 1O/ir)A2/L\R 1.36A2/L\R. (15) Assuming a case of a fiber-optic spectrometer with LAR = 3 nm, the maximum range of the displacements of the interferometer mirror in the above-defined wavelength range is lXLmax 110 ,im.…”
Section: Theoretical Backgroundmentioning
confidence: 99%
“…In contrast with the laser interferometer, there is a compensation plate placed in reference arm of the white-light interferometer. The compensation plate is used for compensation of light dispersion caused by the passage of the white-light beam through the beam splitter 8 . For the interference fringe monitoring, a simple photodetector with a 2 mm diameter of an active area was used.…”
Section: Light Source Spectrum Modelingmentioning
confidence: 99%
“…In contrast with the laser interferometer, there is a compensation plate placed in the reference arm of the whitelight interferometer. The compensation plate is used for the compensation of the light dispersion caused by the passage of the white-light beam through the beam splitter [7].…”
Section: Interferometric Arrangementmentioning
confidence: 99%