1997
DOI: 10.1117/12.273843
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Small radius bends and large angle splitters in SOI waveguides

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Cited by 31 publications
(14 citation statements)
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“…This strain modifies the core/cladding refractive index locally in a way similar to roughness [Foresi97]. We have shown [Agarwal96,Foresi97] that Si/SiO 2 or polySi/SiO 2 is an ideal materials system for monolithically integrated optical signal transmission (Figure 2) that is capable of high confinement, submicron-dimensioned waveguides and micron-dimensioned radii of curvature for flexible routing [Monalato99] (See Figure 3). This capability suggests new degrees of freedom in 3-D architectural design.…”
Section: Photon Propagationmentioning
confidence: 99%
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“…This strain modifies the core/cladding refractive index locally in a way similar to roughness [Foresi97]. We have shown [Agarwal96,Foresi97] that Si/SiO 2 or polySi/SiO 2 is an ideal materials system for monolithically integrated optical signal transmission (Figure 2) that is capable of high confinement, submicron-dimensioned waveguides and micron-dimensioned radii of curvature for flexible routing [Monalato99] (See Figure 3). This capability suggests new degrees of freedom in 3-D architectural design.…”
Section: Photon Propagationmentioning
confidence: 99%
“…The device performance closely follows the photonic crystal design (Figure 9), and the measured Q of 250 is capable of fitting 128 different wavelength channels within the amplifier spectrum. The optical mode volume of the device, 0.055 m 3 , is the smallest ever created [Foresi97]. Optical microcavity resonators can enhance the intensity of Si:Er light emission by as much as 1000x.…”
Section: Photon Confinementmentioning
confidence: 99%
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“…References [28], [42], and [50]- [59] give examples of free-space systems investigated for optical interconnect applications. Waveguides on silicon chips have been investigated [60]- [62], though complete systems using these are not yet demonstrated.…”
Section: A Historical Backgroundmentioning
confidence: 99%
“…There may even therefore be an argument for the use of optical interconnects to enable relatively dense global connections on the chip. Waveguides can be contemplated on chip with cross-sectional dimensions of the order of several micrometers [60]- [62] (though devices to drive optical signals efficiently into such waveguides are still problematic), and free-space devices with areas 10 10 m appear quite feasible. Though a 10 10 m optical device is large compared to the micrometer widths of a wire, it is small compared to the total area (length width) of a global wire on a chip.…”
Section: ) Density Of Interconnectsmentioning
confidence: 99%