From part one, we learned that perovskites are interesting materials with tunable properties. Here, four current applications are elaborated on; high-κ dielectrics, piezoelectrics, optoelectronics, and solar to energy conversion devices. To start with, we discuss perovskite based dynamic random-access memory (DRAM) capacitors, where ALD strontium titanate (STO) of thickness 10 nm can achieve dielectric constants (k) of up to 146. Next, we discuss ALD perovskite piezoelectric-based device design of nanoelectromechanical systems (NEMS) and microelectromechanical systems (MEMS). There is a renewed interest in barium-based ternary compounds which have piezoelectric coefficients up to 500 pC/ N. We further explore ALD perovskitebased solar photovoltaics (PVs), where conformal and uniform layers of lead sulfide (PbS) absorbing layers allow deposition on large surfaces, facilitating perovskite architectures with conversion efficiency reaching 20%. Finally, we learn how lanthanumbased perovskites can replace cerium oxide, which is currently utilized for thermochemical processes for solar to energy conversion. Subsequently, we discuss different characterization techniques allowing us to deepen our understanding of process property relationships eventually leading to further performance enhancements.
K E Y W O R D Satomic layer deposition, high-κ, interfacial growth, nucleation and growth, perovskites, piezoelectric, ultra-thin films
| PEROVSKITE-BASED APPLICATIONSIn the first part of this two-part review, we developed a fundamental understanding of ALD deposition of perovskites, based on growth mechanisms, interfacial interactions, precursor chemistries, and energetics. Now, we review applications where the ALD deposition of perovskites have been leveraged.