Snapshot multi-wavelength interference microscope

Tian, Xiaobo; Tu, Xingzhou; Zhang, Junchao; Spires, Oliver; Brock, Neal; Pau, Stanley; Liang, Rongguang

doi:10.1364/oe.26.018279

Cited by 28 publications

(15 citation statements)

References 23 publications

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“…9. To achieve snapshot measurement, a pixelated polarization camera PolarCam from 4D Technology, Inc. was used to capture 4 interferograms simultaneously [27]. Up to 15 terms of Zernike coefficients were random generated and applied to DM during the experiment.…”

Section: Experimental Demonstrationmentioning

confidence: 99%

Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

et al. 2019

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The interferometry technique is commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 2π ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional phase unwrapping approaches are time-consuming and noise sensitive. To address those issues, we propose a new approach, where we transfer the task of phase unwrapping into a multi-class classification problem and introduce an efficient segmentation network to identify classes. Moreover, a noise-to-noise denoised network is integrated to preprocess noisy wrapped phase. We have demonstrated the proposed method with simulated data and in a real interferometric system.

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Section: Experimental Demonstrationmentioning

confidence: 99%

Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

et al. 2019

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“…This limitation of PCAM structure can induce the mismatch of the measuring point corresponding to each pixel and lowers the lateral resolution of the measurement system. Even though several techniques based on pixel interpolation can be applied [22,23], the effectiveness is fundamentally limited. Another important issue of the color PCAM is the imperfection of the color filter, which leads to the interference fringe mixing between three wavelengths.…”

Section: Principle Of Spatial Phase-shifting Interferometry Using mentioning

confidence: 99%

“…This spatial phase-shifting capability of the PCAM for measuring 3D surface profiles was firstly introduced as dynamic interferometry [17] and has been applied to interferometry [17,18], microscopy [19], digital holography [20] and low-coherence scanning interferometry [21] although it still experiences the 2π-ambiguity. Recently, a color PCAM has been adopted to implement snapshot 3D surface profilometry with the multi-wavelength interferometric technique to eliminate the 2π-ambiguity problem [22,23]. The color PCAM consists of a polarizer and a Bayer color filter array, which enables extraction of the phases for three wavelengths at once.…”

Section: Introductionmentioning

confidence: 99%

Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

Jeon

Joo

2019

Sensors

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In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry.

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“…A Twyman-Green type interferometer is constructed and positioned vertically to minimize the gravity effect caused to the FTL. The polarization camera essentially provides phase shift and capture the interferogram at four different phases [20,21]. A 5X Mitutoyo plan apochromatic objective with NA = 0.14 is used in this experiment.…”

Section: Introductionmentioning

confidence: 99%

Optical performance evaluation and chromatic aberration correction of a focus tunable lens used for 3D microscopy

Yan¹,

Tian²,

Liang³

et al. 2019

Biomed. Opt. Express

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Recently, the development of motion-free 3D microscopy utilizing focus tunable lenses (FTL) has been rapid. However, the downgrade of optical performance due to FTL and its gravity effect are rarely discussed in detail. Also, color dispersion is usually maintained purely depending on the FTL material without further correction. In this manuscript, we provide a quantitative evaluation of the impact of FTL on the optical performance of the microscope. The evaluation is based on both optical ray tracing simulations and lab experiments. In addition, we derive the first order conditions to correct axial color aberration of FTL through its entire power tuning range. Secondary spectrum correction is also possible and an apochromatic motion-free 3D microscope with 2 additional doublets is demonstrated. This study will serve a guidance in utilizing FTL as a motion-free element for 3D microscopy.

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Snapshot multi-wavelength interference microscope

Cited by 28 publications

References 23 publications

Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

Optical performance evaluation and chromatic aberration correction of a focus tunable lens used for 3D microscopy

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