1984
DOI: 10.1016/0167-5087(84)90500-3
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Soft X-ray microscopy at the NSLS

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Cited by 15 publications
(5 citation statements)
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“…It was followed by Günter Schmahl and his group who built and operated the first synchrotron-based full-field imaging or transmission x-ray microscope (TXM) at the Deutsche Elektronenspeicherring for Synchrotron Radiation (DESY), Germany and at the ACO storage ring, France (Niemann et al 1974(Niemann et al , 1976), using holographically fabricated diffractive optics (Schmahl and Rudolph 1969). Independently, Kirz and his group developed the first scanning x-ray microscope (SXM) at the Stanford Synchrotron Radiation Light source (SSRL) and the National Synchrotron Light Source NSLS (Kenney et al 1984). The advent of low-emittance third generation synchrotron sources fostered x-ray microscopy developments with the first undulator microscopy beamline at the NSLS (Rarback et al 1990a), followed by a manifold of other microscopy stations worldwide.…”
Section: Historical Commentsmentioning
confidence: 99%
“…It was followed by Günter Schmahl and his group who built and operated the first synchrotron-based full-field imaging or transmission x-ray microscope (TXM) at the Deutsche Elektronenspeicherring for Synchrotron Radiation (DESY), Germany and at the ACO storage ring, France (Niemann et al 1974(Niemann et al , 1976), using holographically fabricated diffractive optics (Schmahl and Rudolph 1969). Independently, Kirz and his group developed the first scanning x-ray microscope (SXM) at the Stanford Synchrotron Radiation Light source (SSRL) and the National Synchrotron Light Source NSLS (Kenney et al 1984). The advent of low-emittance third generation synchrotron sources fostered x-ray microscopy developments with the first undulator microscopy beamline at the NSLS (Rarback et al 1990a), followed by a manifold of other microscopy stations worldwide.…”
Section: Historical Commentsmentioning
confidence: 99%
“…6 nm x-raya, with a toriodal grating monochromator providing temporal coherence and a pinhole to provide spatial coherence. Our reaul ting coherent flux of typically 10 8 photons/ sec [7,9] was more than 100 times larger than that obtained at the NSLS bending 1 ·' magnet beamline U1S [10] . Besides greatly improving both .exposure time and quality, this dramatically inc;reased illumination greatly simplified the photometry (the coherent flux at X17t was sufficient to produce a photoyield of typically 10-10 Amps on an absolutely calibrated aluminum photodiode [11]) and alignment (the coherent x-ray spot was visible when viewed on a phosphor, even with room illumination) of the experiment.…”
mentioning
confidence: 89%
“…Once the resist KTF is estimated and we are able more accurately calculate developed resist surface relief. we will be able to follow a previously outlined method [10] for correcting for the effects of metal shadowing.…”
mentioning
confidence: 99%
“…Diffractive lenses, known as zone plates, were first demonstrated by Baez [48] for X-ray radiation and have proven to be more effective than refractive lenses at lower X-ray photon energies. The development of synchrotron radiation sources allowed for microscopes based on zone plates to be constructed [49,50].…”
Section: X-ray Microscopy Using Lensesmentioning
confidence: 99%
“…Scanning X-ray microscopes work by illuminating the sample with a very narrow beam of X-rays, then using a single pixel detector to detect the total amount of X-rays transmitted by the sample. Such a system [50] can be constructed by using a zone plate, as depicted in Fig. 13, to focus light onto a small circular aperture.…”
Section: X-ray Microscopy Using Lensesmentioning
confidence: 99%