Solenoidal micro coils manufactured with a wire bonder

Kratt, K.; Seidel, Michael; Emmenegger, M.; Wallrabe, Ulrike; Korvink, Jan G.

doi:10.1109/memsys.2008.4443826

Cited by 15 publications

(14 citation statements)

References 10 publications

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“…[12]. Even, in order to fabricate microstructures on the thin cylindrical substrate, an automatic wire bonder was also utilized in the work [13,14]. However, in these methods the devices are usually fabricated on glass capillary or metal stick surface.…”

Section: Flexible Implantable Microtemperature Sensormentioning

confidence: 99%

Lab-on-a-Tube Surface Micromachining Technology

Yang¹,

Zhang²

2017

Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets

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In this chapter, the lab-on-a-tube surface micromachining technology will be used to fabricate a flexible implantable microtemperature sensor for hyperthermia application and a three-electrode system on a polymer tube surface for glucose monitoring application. This micromachining process is based on two homemade equipments: a spray coating equipment and a programmable UV 3D projection lithography system with alignment. In the spray coating system, there is a heater nozzle next to the spray nozzle for real-time heating. Pure nitrogen is flowed through the heater nozzle, warmed up and sprayed onto the tube substrate surface. The programmable UV lithography equipment for cylindrical substrate mainly consists of four parts: a uniform illumination system, a reduced projection lithography system, a synchronized motion stage system, and a Charge-Coupled Device (CCD) multilayer alignment system which is used to observe simultaneously the projected mask's patterns and those ever fabricated on the tube. Using the developed labon-a-tube surface micromachining technology, an implantable flexible microtemperature sensor and a three-electrode microstructure are successfully fabricated on the flexible polymer tube with 330 μm outer diameter, respectively. The test temperature coefficient of resistance (TCR) of the temperature sensor is 0.0034/°C. The measured cyclic voltammetry curve shows that the three-electrode system has a good redox property.

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Section: Flexible Implantable Microtemperature Sensormentioning

confidence: 99%

Lab-on-a-Tube Surface Micromachining Technology

Yang¹,

Zhang²

2017

Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets

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“…In comparison to that, micro-motors (d a ¼ 10 mm; h ¼ 16 mm) that use a conventional magnet design with several magnet poles but using an air spool show efficiencies about 69% and a power density of 91 W/kg (Faulhaber, 2013). As demonstrated in Kratt (2010), insulated gold wires of 25 μm diameter are manufacturable for the use of stator coils and have been wound as spools with diameter of less than 1 mm. This wire could be used to build an air spool that is located inside the ring rotor with shape 2.…”

Section: Motor/generator Types For Micro-fessmentioning

confidence: 99%

Feasibility Study for Small Scaling Flywheel-Energy-Storage Systems in Energy Harvesting Systems

Ertz¹,

Twiefel²,

Krack³

2014

Energy Harvesting and Systems

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Two concepts of scaled micro-flywheel-energystorage systems (FESSs): a flat disk-shaped and a thin ringshaped (outer diameter equal to height) flywheel rotors were examined in this study, focusing on material selection, energy content, losses due to air friction and motor loss. For the disk-shape micro-FESS, isotropic materials like titanium, aluminum, steel and wolfram are shown to be suitable as a flywheel rotor. Wound fiber reinforced composite plastics (T1000-, T300-carbon fibers and carbon nanotubes "CNTs") were investigated for the flywheel in a ring shape. It was shown that isotropic materials reach the highest energy densities in the shape of a Laval disk with a rim. A micro-FESS with wolfram flywheel would reach the highest half-timeperiods due to its high density, and thus, it is the favored material to design a flat disk-shaped micro-FESS with low standby-losses. Fiber reinforced plastic flywheels in ring shape reach the highest energy densities, from 150 W h/kg (T300) to 2,600 W h/kg (CNT), but display higher standbylosses as well. A scaling of the rotors was done within this study and showed that air friction is influenced by the shape of the examined flywheel rotors and the material. A linear correlation of down scaling and air friction losses was shown. As a motor/generator type, an ironless air coil Halbach array motor was suggested. Motor losses due to eddy currents in the stator coil were estimated. Losses correlated in square with downscaling. FESSs with wolfram and CNT showed the lowest standby-losses due to eddy currents.

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“…The Mu-metal cores were assembled into the PCB without any final annealing step after EDM machining. With a wire bonder [5] 3D coils with 32 µm thick gold wire are wound around the cores. So far the wire bonder only can assimilate non-insulated wire [5].…”

Section: Fabrication and Intention Of The Approachmentioning

confidence: 99%

“…With a wire bonder [5] 3D coils with 32 µm thick gold wire are wound around the cores. So far the wire bonder only can assimilate non-insulated wire [5]. Therefore a distance of approximately one wire diameter is kept in between the windings, and the metal cores need to be insulated.…”

Section: Fabrication and Intention Of The Approachmentioning

confidence: 99%

See 1 more Smart Citation

Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane

Mack

Kratt

Stuermer

et al. 2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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This work describes the fabrication and characterization of an electromagnetic micro generator array for energy harvesting purposes. The array consists of a magnetic polydimethylsiloxane (PDMS) membrane with 3x3 magnets which is aligned over a PCB with 3x3 coils. Different coil cores are tested and compared. The parameter for comparison is the voltage induced in the coil array by the vibrating membrane. The maximum measured voltage is 1.2 mV when exciting the converter array with an acceleration of 60 m/s².

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Solenoidal micro coils manufactured with a wire bonder

Cited by 15 publications

References 10 publications

Lab-on-a-Tube Surface Micromachining Technology

Lab-on-a-Tube Surface Micromachining Technology

Feasibility Study for Small Scaling Flywheel-Energy-Storage Systems in Energy Harvesting Systems

Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane

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