As technology rapidly advances, semiconductor devices play a crucial role in various fields. However, these devices experience aging over time, leading to performance degradation, failure, or system crashes. Real-time aging detection of semiconductor devices is essential. This paper presents a real-time aging detection technique for semiconductor devices, combining deep learning and evolutionary algorithms, effectively assessing and predicting device aging states using Convolutional Neural Networks (CNN) and Recurrent Neural Networks (RNN). These features are then input into evolutionary algorithm frameworks, such as Genetic Algorithms (GA) and Genetic Algorithms (PSO), to identify and predict aging trends. The adaptation of evolutionary algorithms ensures good generalization for various semiconductor devices. Through extensive experimental data analysis, the proposed technique demonstrates excellent accuracy and real-time performance compared to traditional aging detection methods. In addition, it also monitors their operation in real-time, providing valuable support for maintenance and management personnel. The findings contribute to improving semiconductor device reliability and stability, providing a robust foundation for intelligent and automated maintenance.