Solid-state nanopore localization by controlled breakdown of selectively thinned membranes

Carlsen, Autumn; Briggs, Kyle; Hall, Adam R.; Tabard‐Cossa, Vincent

doi:10.1088/1361-6528/aa564d

Cited by 61 publications

(69 citation statements)

References 65 publications

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“…and Carlsen et al . reported that the breakdown can be localized in a selectively thinned membrane 46 , 47 . The spatial control over nanopore formation, combined with the nanopore count and diameter control pave the way for this type of nanopore array fabrication to find applications in optical measurement setups.…”

Section: Resultsmentioning

confidence: 99%

“…Although the electric field strength decreased in other regions of the membrane, the existing defects keep growing in number. This growth allows the multiple nanopore formation 46 , 47 . To control the multiple nanopore formation process by adjusting the applied electric field, we consider the fabrication process a breakdown and an enlargement process.…”

Section: Resultsmentioning

confidence: 99%

“…So far, dielectric breakdown mainly creates single nanopores with a diameter of about 5 nm 37 , 40 – 45 . The formation of multiple nanopores requires the combination of nano- and micro- structuring 46 , 47 , or microfluidic channels 48 , which again increases the complexity of this method.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of multiple nanopores in a SiNx membrane via controlled breakdown

Wang

Ying

Zhou

et al. 2018

Sci Rep

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This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiNx) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the same diameter. We propose a membrane resistance model to explain and control the multiple nanopores forming in the membrane. We prove that the membrane resistance can reflect the number of nanopores in the membrane and that the diameter of the nanopores is controlled by the exposure time and strength of the electric field. This controllable multiple nanopore formation via CBD avoids the utilization of complicated instruments and time-intensive manufacturing. We anticipate CBD has the potential to become a nanopore fabrication technique which, integrated into an optical setup, could be used as a high-throughput and multichannel characterization technique.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication of multiple nanopores in a SiNx membrane via controlled breakdown

Wang

Ying

Zhou

et al. 2018

Sci Rep

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“…Nanopore fabrication by dielectric breakdown has a great advantage in terms of fabrication cost; expensive equipment, such as that needed for EB lithography, TEM or HIM, is not required. However, this method is rather unsuitable for the stable fabrication of a single large nanopore due to the risk of generating multiple nanopores 33 , 34 , 36 , 37 when trying to widen a nanopore by additional voltage stresses. Therefore, most of the nanopores used in previous studies 29 – 31 , 40 – 46 fabricated by dielectric breakdown were less than approximately 5 nm in diameter.…”

Section: Introductionmentioning

confidence: 99%

Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration

Yanagi

Hamamura

Akahori

et al. 2018

Sci Rep

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For the nanopore sensing of various large molecules, such as probe-labelled DNA and antigen-antibody complexes, the nanopore size has to be customized for each target molecule. The recently developed nanopore fabrication method utilizing dielectric breakdown of a membrane is simple and quite inexpensive, but it is somewhat unsuitable for the stable fabrication of a single large nanopore due to the risk of generating multiple nanopores. To overcome this bottleneck, we propose a new technique called “two-step breakdown” (TSB). In the first step of TSB, a local conductive thin portion (not a nanopore) is formed in the membrane by dielectric breakdown. In the second step, the created thin portion is penetrated by voltage pulses whose polarity is opposite to the polarity of the voltage used in the first step. By applying TSB to a 20-nm-thick SiN membrane, a single nanopore with a diameter of 21–26 nm could be fabricated with a high yield of 83%.

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“…As a result, a universal predetermined cutoff current is impossible to implement. False positive (negative) nanopore formation will occur if the cutoff current is set too low (high) [27,28,40,41]. To solve this issue, MPVI [31] was proposed.…”

Section: Introductionmentioning

confidence: 99%