2020
DOI: 10.1109/mmm.2020.2993478
|View full text |Cite
|
Sign up to set email alerts
|

Solid-State Qubits: 3D Integration and Packaging

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

0
29
0

Year Published

2020
2020
2023
2023

Publication Types

Select...
2
2
1

Relationship

0
5

Authors

Journals

citations
Cited by 47 publications
(29 citation statements)
references
References 64 publications
0
29
0
Order By: Relevance
“…Air bridges over cavities are proposed to connect both sides of ground planes to improve the distribution of current density. 83,85 Air bridges also facilitate two cavities crossing each other and provide a geometric flexibility for quchip layout. 85 One disadvantage of coplanar cavities is that more than 80% of electrical field travels through the dissipative silicon substrate resulting in energy loss.…”
Section: Geometric Considerationsmentioning
confidence: 99%
See 4 more Smart Citations
“…Air bridges over cavities are proposed to connect both sides of ground planes to improve the distribution of current density. 83,85 Air bridges also facilitate two cavities crossing each other and provide a geometric flexibility for quchip layout. 85 One disadvantage of coplanar cavities is that more than 80% of electrical field travels through the dissipative silicon substrate resulting in energy loss.…”
Section: Geometric Considerationsmentioning
confidence: 99%
“…83,85 Air bridges also facilitate two cavities crossing each other and provide a geometric flexibility for quchip layout. 85 One disadvantage of coplanar cavities is that more than 80% of electrical field travels through the dissipative silicon substrate resulting in energy loss. Comparing with cylindrical 3D cavities, the resonance lifetime is about one magnitude of order shorter.…”
Section: Geometric Considerationsmentioning
confidence: 99%
See 3 more Smart Citations